Akiko Yamamoto

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Shizuoka, JP

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Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS...
- Publication number 20110318505
- Publication date Dec 29, 2011
- Akiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...