Akimichi Yonekura

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Yokohama, JP

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Patents Grantslast 30 patents

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Vertical boat used for heat treatment of semiconductor wafer and ve...
- Patent number 5,316,472
- Issue date May 31, 1994
- Tokyo Electron Limited
- Reiji Niino
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of processing substrates and substrate processing apparatus
- Patent number 5,286,523
- Issue date Feb 15, 1994
- Kabushiki Kaisha Toshiba
- Tetsuo Matsuda
- C30 - CRYSTAL GROWTH