Akimitsu Ebihara

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 10,191,388
- Issue date Jan 29, 2019
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 10,007,188
- Issue date Jun 26, 2018
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,810,995
- Issue date Nov 7, 2017
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,551,943
- Issue date Jan 24, 2017
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,274,437
- Issue date Mar 1, 2016
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 9,025,129
- Issue date May 5, 2015
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,019,473
- Issue date Apr 28, 2015
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,001,307
- Issue date Apr 7, 2015
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and making method thereof
- Patent number 8,953,148
- Issue date Feb 10, 2015
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,830,445
- Issue date Sep 9, 2014
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Motor device, method of manufacturing motor device, and robot device
- Patent number 8,796,905
- Issue date Aug 5, 2014
- Nikon Corporation
- Takashi Nagase
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Projection optical device and exposure apparatus
- Patent number 8,767,172
- Issue date Jul 1, 2014
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,767,177
- Issue date Jul 1, 2014
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,724,085
- Issue date May 13, 2014
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,717,537
- Issue date May 6, 2014
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,705,001
- Issue date Apr 22, 2014
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,692,976
- Issue date Apr 8, 2014
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device and coordinate correction method for the same, exposur...
- Patent number 8,681,314
- Issue date Mar 25, 2014
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Motor device, apparatus and driving method for rotor
- Patent number 8,674,586
- Issue date Mar 18, 2014
- Nikon Corporation
- Akimitsu Ebihara
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Motor device, method of manufacturing motor device, and robot device
- Patent number 8,441,171
- Issue date May 14, 2013
- Nikon Corporation
- Masashi Okada
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,436,979
- Issue date May 7, 2013
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,436,978
- Issue date May 7, 2013
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposing method, exposure apparatus, and device fabricating method
- Patent number 8,436,981
- Issue date May 7, 2013
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,319,941
- Issue date Nov 27, 2012
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,027,027
- Issue date Sep 27, 2011
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,018,575
- Issue date Sep 13, 2011
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 7,969,557
- Issue date Jun 28, 2011
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 7,907,252
- Issue date Mar 15, 2011
- Nikon Corporation
- Akimitsu Ebihara
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 7,812,925
- Issue date Oct 12, 2010
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Wafer positioner with planar motor and mag-lev fine stage
- Patent number RE41232
- Issue date Apr 20, 2010
- Nikon Corporation
- Andrew J. Hazelton
- 310 - Electrical generator or motor structure

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20180299788
- Publication date Oct 18, 2018
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180039185
- Publication date Feb 8, 2018
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170123326
- Publication date May 4, 2017
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20160202617
- Publication date Jul 14, 2016
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150198897
- Publication date Jul 16, 2015
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20140293252
- Publication date Oct 2, 2014
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140211176
- Publication date Jul 31, 2014
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140211177
- Publication date Jul 31, 2014
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20130250257
- Publication date Sep 26, 2013
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20130229637
- Publication date Sep 5, 2013
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20130215403
- Publication date Aug 22, 2013
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20120200837
- Publication date Aug 9, 2012
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
ISOLATION SYSTEM FOR AN OPTICAL ELEMENT OF AN EXPOSURE APPARATUS
- Publication number 20120127445
- Publication date May 24, 2012
- Akimitsu Ebihara
- G02 - OPTICS
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20120008111
- Publication date Jan 12, 2012
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
Motor device, method of manufacturing motor device, and robot device
- Publication number 20110241484
- Publication date Oct 6, 2011
- Nikon Corporation
- Masashi OKADA
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Motor device, method of manufacturing motor device, and robot device
- Publication number 20110241485
- Publication date Oct 6, 2011
- Nikon Corporation
- Takashi Nagase
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Projection optical device and exposure apparatus
- Publication number 20110043781
- Publication date Feb 24, 2011
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20110025997
- Publication date Feb 3, 2011
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20110025996
- Publication date Feb 3, 2011
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
Motor device, apparatus and driving method for rotor
- Publication number 20100164326
- Publication date Jul 1, 2010
- Nikon Corporation
- Akimitsu Ebihara
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Exposing method, exposure apparatus, and device fabricating method
- Publication number 20090268177
- Publication date Oct 29, 2009
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20090190112
- Publication date Jul 30, 2009
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
Stage Apparatus and Exposing Apparatus
- Publication number 20080236997
- Publication date Oct 2, 2008
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection Optical Device And Exposure Apparatus
- Publication number 20080068568
- Publication date Mar 20, 2008
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20080002166
- Publication date Jan 3, 2008
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20070211234
- Publication date Sep 13, 2007
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus and making method thereof
- Publication number 20070206170
- Publication date Sep 6, 2007
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device and coordinate correction method for the same, exposur...
- Publication number 20070109522
- Publication date May 17, 2007
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Utility transfer apparatus, stage apparatus, exposure apparatus, an...
- Publication number 20070095739
- Publication date May 3, 2007
- Nikon Corporation
- Akimitsu Ebihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20070064214
- Publication date Mar 22, 2007
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY

Akimitsu Ebihara

Person

Patents Grantslast 30 patents

Exposure apparatus, and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus and making method thereof

Exposure apparatus, and device manufacturing method

Motor device, method of manufacturing motor device, and robot device

Projection optical device and exposure apparatus

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Stage device and coordinate correction method for the same, exposur...

Motor device, apparatus and driving method for rotor

Motor device, method of manufacturing motor device, and robot device

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposing method, exposure apparatus, and device fabricating method

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Wafer positioner with planar motor and mag-lev fine stage

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

ISOLATION SYSTEM FOR AN OPTICAL ELEMENT OF AN EXPOSURE APPARATUS

Exposure apparatus, and device manufacturing method

Motor device, method of manufacturing motor device, and robot device

Motor device, method of manufacturing motor device, and robot device

Projection optical device and exposure apparatus

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Motor device, apparatus and driving method for rotor

Exposing method, exposure apparatus, and device fabricating method

Exposure apparatus, and device manufacturing method

Stage Apparatus and Exposing Apparatus

Projection Optical Device And Exposure Apparatus

Exposure apparatus, and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus and making method thereof

Stage device and coordinate correction method for the same, exposur...

Utility transfer apparatus, stage apparatus, exposure apparatus, an...

Exposure apparatus, and device manufacturing method