Akimitsu Ebihara

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San Mateo, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Precision scanning apparatus and method with fixed and movable guid...
- Patent number 6,363,809
- Issue date Apr 2, 2002
- Nikon Corporation, Japan
- W. Thomas Novak
- G05 - CONTROLLING REGULATING
Information Patent Grant
Precision scanning apparatus and method with fixed and movable guid...
- Patent number 6,134,981
- Issue date Oct 24, 2000
- Nikon Research Corporation of America
- W. Thomas Novak
- G05 - CONTROLLING REGULATING
Information Patent Grant
Precision motion stage with single guide beam and follower stage
- Patent number 5,996,437
- Issue date Dec 7, 1999
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Precision motion stage with single guide beam and follower stage
- Patent number 5,623,853
- Issue date Apr 29, 1997
- Nikon Precision Inc.
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY