Akinari Fukaya

Person

  • Obu, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Polishing method for SOI

    • Patent number 5,851,846
    • Issue date Dec 22, 1998
    • Nippondenso Co., Ltd.
    • Masaki Matsui
    • H01 - BASIC ELECTRIC ELEMENTS