Akinari Morikawa

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus and cleaning method
- Patent number 11,458,513
- Issue date Oct 4, 2022
- HITACHI HIGH-TECH CORPORATION
- Akinari Morikawa
- B08 - CLEANING
Information Patent Grant
Charged particle beam device and sample preparation method
- Patent number 9,362,088
- Issue date Jun 7, 2016
- Hitachi High-Technologies Corporation
- Takahiro Sato
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device and sample observation method
- Patent number 8,546,770
- Issue date Oct 1, 2013
- Hitachi High-Technologies Corporation
- Akinari Morikawa
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device
- Patent number 7,964,845
- Issue date Jun 21, 2011
- Hitachi High-Technologies Corporation
- Yuusuke Tanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device with DF-STEM image valuation method
- Patent number 7,459,683
- Issue date Dec 2, 2008
- Hitachi High-Technologies Corporation
- Mine Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 6,963,069
- Issue date Nov 8, 2005
- Hitachi High-Technologies Corporation
- Yuusuke Tanba
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Apparatus and Cleaning Method
- Publication number 20220402000
- Publication date Dec 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Akinari MORIKAWA
- B08 - CLEANING
Information Patent Application
Charged Particle Beam Apparatus and Cleaning Method
- Publication number 20200206789
- Publication date Jul 2, 2020
- Hitachi High-Technologies Corporation
- Akinari MORIKAWA
- B08 - CLEANING
Information Patent Application
Charged Particle Beam Device and Sample Preparation Method
- Publication number 20150255250
- Publication date Sep 10, 2015
- Hitachi High-Technologies Corporation
- Takahiro Sato
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device and Sample Observation Method
- Publication number 20120292507
- Publication date Nov 22, 2012
- Hitachi High-Technologies Corporation
- Akinari Morikawa
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam device
- Publication number 20090050803
- Publication date Feb 26, 2009
- Yuusuke Tanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam device with DF-STEM image valuation method
- Publication number 20070085007
- Publication date Apr 19, 2007
- Hitachi High-Technologies Corporation
- Mine Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam device
- Publication number 20040238752
- Publication date Dec 2, 2004
- Yuusuke Tanba
- H01 - BASIC ELECTRIC ELEMENTS

Akinari Morikawa

Person

Patents Grantslast 30 patents

Charged particle beam apparatus and cleaning method

Charged particle beam device and sample preparation method

Charged particle beam device and sample observation method

Charged particle beam device

Charged particle beam device with DF-STEM image valuation method

Charged particle beam device

Patents Applicationslast 30 patents

Charged Particle Beam Apparatus and Cleaning Method

Charged Particle Beam Apparatus and Cleaning Method

Charged Particle Beam Device and Sample Preparation Method

Charged Particle Beam Device and Sample Observation Method

Charged particle beam device

Charged particle beam device with DF-STEM image valuation method

Charged particle beam device