Akinobu NASU

Person

AkatsukaTsukuba, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Source liquid supply apparatus having a cleaning function
- Patent number 7,487,806
- Issue date Feb 10, 2009
- L'Air Liquide, Société Anonyme á Directorie et Conseil de Surveillance pour l...
- Olivier Letessier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copper source liquid for MOCVD processes and method for the prepara...
- Patent number 6,656,255
- Issue date Dec 2, 2003
- L'Air Liquide Societe Anonyme A Directoire et Conseil de Surveillance pour l'...
- Akinobu Nasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COPPER INTERCONNECTION FOR FLAT PANEL DISPLAY MANUFACTURING
- Publication number 20100317191
- Publication date Dec 16, 2010
- Akinobu Nasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electroless Niwp Adhesion and Capping Layers for Tft Copper Gate Pr...
- Publication number 20090004372
- Publication date Jan 1, 2009
- Akinobu Nasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A COPPER LAYER ON A SUBSTRATE IN A FLAT PANEL...
- Publication number 20080248194
- Publication date Oct 9, 2008
- L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEO...
- Akinobu NASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Source liquid supply apparatus having a cleaning function
- Publication number 20050109374
- Publication date May 26, 2005
- Olivier Letessier
- B08 - CLEANING
Information Patent Application
COPPER SOURCE LIQUID FOR MOCVD PROCESSES AND METHOD FOR THE PREPARA...
- Publication number 20030183121
- Publication date Oct 2, 2003
- Akinobu Nasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for the distribution of treatment liquids
- Publication number 20020043488
- Publication date Apr 18, 2002
- Olivier Letessier
- G05 - CONTROLLING REGULATING

Akinobu NASU

Person

Patents Grantslast 30 patents

Source liquid supply apparatus having a cleaning function

Copper source liquid for MOCVD processes and method for the prepara...

Patents Applicationslast 30 patents

COPPER INTERCONNECTION FOR FLAT PANEL DISPLAY MANUFACTURING

Electroless Niwp Adhesion and Capping Layers for Tft Copper Gate Pr...

METHOD FOR PRODUCING A COPPER LAYER ON A SUBSTRATE IN A FLAT PANEL...

Source liquid supply apparatus having a cleaning function

COPPER SOURCE LIQUID FOR MOCVD PROCESSES AND METHOD FOR THE PREPARA...

Method and apparatus for the distribution of treatment liquids