Akinori Mine

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Shizuoka, PA, US

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing apparatus and method for diagnosing D...
- Patent number 8,290,743
- Issue date Oct 16, 2012
- Nuflare Technology, Inc.
- Seiichi Tsuchiya
- B82 - NANO-TECHNOLOGY