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Akinori MIYAHARA
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Koshi City, JP
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last 30 patents
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Patent Grant
Inspection device, bonding system and inspection method
Patent number
9,097,681
Issue date
Aug 4, 2015
Tokyo Electron Limited
Shinji Koga
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
INSPECTION DEVICE, BONDING SYSTEM AND INSPECTION METHOD
Publication number
20140054463
Publication date
Feb 27, 2014
TOKYO ELECTRON LIMITED
Shinji KOGA
G01 - MEASURING TESTING
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Patent Application
INSPECTION DEVICE, BONDING SYSTEM AND INSPECTION METHOD
Publication number
20140055599
Publication date
Feb 27, 2014
TOKYO ELECTRON LIMITED
Shinji KOGA
G01 - MEASURING TESTING