Akinori Nakano

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and apparatus
- Patent number 11,482,418
- Issue date Oct 25, 2022
- ASM IP Holding B.V.
- Akinori Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for protecting layer by forming hydrocarbon-based extremely...
- Patent number 9,899,291
- Issue date Feb 20, 2018
- ASM IP Holding B.V.
- Richika Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for hydrophobization of surface of silicon-containing film b...
- Patent number 9,478,414
- Issue date Oct 25, 2016
- ASM IP Holding B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for filling recesses using pre-treatment with hydrocarbon-co...
- Patent number 9,117,657
- Issue date Aug 25, 2015
- ASM IP Holding B.V.
- Akinori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating SiOCH film with hydrogen plasma
- Patent number 9,029,272
- Issue date May 12, 2015
- ASM IP Holding B.V.
- Akinori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing dielectric constant of film using direct plasma...
- Patent number 8,551,892
- Issue date Oct 8, 2013
- ASM Japan K.K.
- Akinori Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner materials and related processes for 3-D integration
- Patent number 7,884,016
- Issue date Feb 8, 2011
- ASM International, NV.
- Hessel Sprey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Copolymerized high polymer film and method of manufacturing the same
- Patent number 7,524,908
- Issue date Apr 28, 2009
- NEC Corporation
- Jun Kawahara
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Polymer film and method for producing the same
- Patent number 7,439,315
- Issue date Oct 21, 2008
- NEC Corporation
- Nobutaka Kunimi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Polymer film and method for producing the same
- Patent number 7,220,810
- Issue date May 22, 2007
- Sumitomo Chemical Company, Limited
- Nobutaka Kunimi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Growth method of a polymer film
- Patent number 6,261,974
- Issue date Jul 17, 2001
- NEC Corporation
- Jun Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20230040728
- Publication date Feb 9, 2023
- ASM IP HOLDING B.V.
- Akinori Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20190259611
- Publication date Aug 22, 2019
- ASM IP HOLDING B.V.
- Akinori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROTECTING LAYER BY FORMING HYDROCARBON-BASED EXTREMELY...
- Publication number 20170018477
- Publication date Jan 19, 2017
- ASM IP HOLDING B.V.
- Richika Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Hydrophobization of Surface of Silicon-Containing Film b...
- Publication number 20160093485
- Publication date Mar 31, 2016
- ASM IP HOLDING B.V.
- Akiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Treating SiOCH Film With Hydrogen Plasma
- Publication number 20150118864
- Publication date Apr 30, 2015
- ASM IP HOLDING B.V.
- Akinori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Filling Recesses Using Pre-Treatment With Hydrocarbon-Co...
- Publication number 20140363983
- Publication date Dec 11, 2014
- Akinori Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REDUCING DIELECTRIC CONSTANT OF FILM USING DIRECT PLASMA...
- Publication number 20130029498
- Publication date Jan 31, 2013
- ASM JAPAN K.K.
- Akinori Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINER MATERIALS AND RELATED PROCESSES FOR 3-D INTEGRATION
- Publication number 20100200989
- Publication date Aug 12, 2010
- ASM International, N.V.
- Hessel Sprey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING LOW-K FILM HAVING CHEMICAL RESISTANCE
- Publication number 20100151151
- Publication date Jun 17, 2010
- ASM JAPAN K.K.
- Kiyohiro Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FLUORINE-CONTAINING DIELECTRIC FILM
- Publication number 20100003833
- Publication date Jan 7, 2010
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Polymer film and method for producing the same
- Publication number 20060052560
- Publication date Mar 9, 2006
- Sumitomo Chemical Company, Limited
- Nobutaka Kunimi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Polymer film and method for producing the same
- Publication number 20060009600
- Publication date Jan 12, 2006
- Sumitomo Chemical Company, Limited
- Nobutaka Kunimi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Copolymerized high polymer film and method of manufacturing the same
- Publication number 20050282987
- Publication date Dec 22, 2005
- NEC Corporation
- Jun Kawahara
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Akinori Nakano

Person

Patents Grantslast 30 patents

Substrate processing method and apparatus

Method for protecting layer by forming hydrocarbon-based extremely...

Method for hydrophobization of surface of silicon-containing film b...

Method for filling recesses using pre-treatment with hydrocarbon-co...

Method for treating SiOCH film with hydrogen plasma

Method for reducing dielectric constant of film using direct plasma...

Liner materials and related processes for 3-D integration

Copolymerized high polymer film and method of manufacturing the same

Polymer film and method for producing the same

Polymer film and method for producing the same

Growth method of a polymer film

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND APPARATUS

SUBSTRATE PROCESSING METHOD AND APPARATUS

METHOD FOR PROTECTING LAYER BY FORMING HYDROCARBON-BASED EXTREMELY...

Method for Hydrophobization of Surface of Silicon-Containing Film b...

Method for Treating SiOCH Film With Hydrogen Plasma

Method For Filling Recesses Using Pre-Treatment With Hydrocarbon-Co...

METHOD FOR REDUCING DIELECTRIC CONSTANT OF FILM USING DIRECT PLASMA...

LINER MATERIALS AND RELATED PROCESSES FOR 3-D INTEGRATION

METHOD OF FORMING LOW-K FILM HAVING CHEMICAL RESISTANCE

METHOD OF FORMING FLUORINE-CONTAINING DIELECTRIC FILM

Polymer film and method for producing the same

Polymer film and method for producing the same

Copolymerized high polymer film and method of manufacturing the same