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Akinori Ohkubo
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for estimating wavefront parameters
Patent number
9,182,289
Issue date
Nov 10, 2015
Canon Kabushiki Kaisha
Harrison Barrett
G01 - MEASURING TESTING
Information
Patent Grant
Wavefront optical measuring apparatus
Patent number
9,091,614
Issue date
Jul 28, 2015
Canon Kabushiki Kaisha
Akinori Ohkubo
G01 - MEASURING TESTING
Information
Patent Grant
Exposure apparatus
Patent number
8,085,384
Issue date
Dec 27, 2011
Canon Kabushiki Kaisha
Akinori Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for image measurement, exposure apparatus, substr...
Patent number
8,009,272
Issue date
Aug 30, 2011
Canon Kabushiki Kaisha
Akinori Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement apparatus, exposure apparatus, and device manufacturing...
Patent number
7,911,585
Issue date
Mar 22, 2011
Canon Kabushiki Kaisha
Akinori Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle remover, exposure apparatus having the same, and device ma...
Patent number
7,414,240
Issue date
Aug 19, 2008
Canon Kabushiki Kaisha
Akinori Ohkubo
B08 - CLEANING
Information
Patent Grant
Exposure apparatus comprising cleaning apparatus for cleaning mask...
Patent number
7,379,151
Issue date
May 27, 2008
Canon Kabushiki Kaisha
Hiroshi Osawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Point diffraction interferometer and exposure apparatus and method...
Patent number
7,304,749
Issue date
Dec 4, 2007
Canon Kabushiki Kaisha
Akinori Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measuring apparatus and exposure apparatus having the same
Patent number
7,295,327
Issue date
Nov 13, 2007
Canon Kabushiki Kaisha
Akinori Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion optical system and optical apparatus having the same
Patent number
7,199,939
Issue date
Apr 3, 2007
Canon Kabushiki Kaisha
Akinori Ohkubo
G11 - INFORMATION STORAGE
Patents Applications
last 30 patents
Information
Patent Application
WAVEFRONT MEASURING APPARATUS, WAVEFRONT MEASURING METHOD, METHOD O...
Publication number
20150073752
Publication date
Mar 12, 2015
Canon Kabushiki Kaisha
Akinori OHKUBO
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR ESTIMATING WAVEFRONT PARAMETERS
Publication number
20130092816
Publication date
Apr 18, 2013
Canon Kabushiki Kaisha
Harrison Barrett
G01 - MEASURING TESTING
Information
Patent Application
WAVEFRONT OPTICAL MEASURING APPARATUS
Publication number
20120296591
Publication date
Nov 22, 2012
Canon Kabushiki Kaisha
Akinori Ohkubo
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
Publication number
20090009740
Publication date
Jan 8, 2009
Canon Kabushiki Kaisha
Akinori Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR IMAGE MEASUREMENT, EXPOSURE APPARATUS, SUBSTR...
Publication number
20080291420
Publication date
Nov 27, 2008
Canon Kabushiki Kaisha
Akinori Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS
Publication number
20070252968
Publication date
Nov 1, 2007
Akinori Ohkubo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS
Publication number
20070013892
Publication date
Jan 18, 2007
Hiroshi Osawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion optical system and optical apparatus having the same
Publication number
20060146662
Publication date
Jul 6, 2006
Canon Kabushiki Kaisha
Akinori Ohkubo
G02 - OPTICS
Information
Patent Application
Particle remover, exposure apparatus having the same, and device ma...
Publication number
20060086371
Publication date
Apr 27, 2006
Akinori Ohkubo
B08 - CLEANING