Akinori Shimamura

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Reduced-pressure drying apparatus
- Patent number 10,615,378
- Issue date Apr 7, 2020
- Tokyo Electron Limited
- Akinori Shimamura
- F26 - DRYING
Information Patent Grant
Process gas introducing mechanism and plasma processing device
- Patent number 8,191,505
- Issue date Jun 5, 2012
- Tokyo Electron Limited
- Takayuki Kamaishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM A...
- Publication number 20240120225
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20230154777
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Akinori SHIMAMURA
- B08 - CLEANING
Information Patent Application
REDUCED-PRESSURE DRYING APPARATUS
- Publication number 20180097205
- Publication date Apr 5, 2018
- Akinori SHIMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process gas introducing mechanism and plasma processing device
- Publication number 20090260762
- Publication date Oct 22, 2009
- TOKYO ELECTRON LIMITED
- Takayuki Kamaishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate placing mechanism
- Publication number 20070089672
- Publication date Apr 26, 2007
- Akinori Shimamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process gas introducing mechanism and plasma processing device
- Publication number 20060060141
- Publication date Mar 23, 2006
- TOKYO ELECTRON LIMITED
- Takayuki Kamaishi
- H01 - BASIC ELECTRIC ELEMENTS