Akinori Tanaka

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,087,598
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 12,014,943
- Issue date Jun 18, 2024
- Kokusai Electric Corporation
- Akinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate temperature sensor, substrate retainer and substrate proc...
- Patent number 11,906,367
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 11,869,764
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 11,519,815
- Issue date Dec 6, 2022
- Kokusai Electric Corporation
- Akinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,476,112
- Issue date Oct 18, 2022
- Kokusai Electric Corporation
- Akinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas sampling cell
- Patent number D813065
- Issue date Mar 20, 2018
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Substrate processing apparatus and semiconductor device manufacturi...
- Patent number 9,530,677
- Issue date Dec 27, 2016
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including shielding unit for suppres...
- Patent number 9,084,298
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,851,886
- Issue date Oct 7, 2014
- Hitachi Kokusai Electric, Inc.
- Shinya Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TEMPERATURE SENSOR, SUBSTRATE RETAINER AND SUBSTRATE PROC...
- Publication number 20240151591
- Publication date May 9, 2024
- Kokusai Electric Corporation
- Tokunobu AKAO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...
- Publication number 20240096615
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Akinori TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230357920
- Publication date Nov 9, 2023
- Kokusai Electric Corporation
- Yuji Saiki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20230077197
- Publication date Mar 9, 2023
- Kokusai Electric Corporation
- Akinori TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20230067800
- Publication date Mar 2, 2023
- Kokusai Electric Corporation
- Akinori TANAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FURNACE OPENING ASSEMBLY, SUBSTRATE...
- Publication number 20220298627
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Tatsuya NISHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MAN...
- Publication number 20220098722
- Publication date Mar 31, 2022
- Kokusai Electric Corporation
- Akinori TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220090258
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Yuji SAIKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Temperature Sensor, Substrate Retainer and Substrate Proc...
- Publication number 20210181033
- Publication date Jun 17, 2021
- Kokusai Electric Corporation
- Tokunobu AKAO
- G01 - MEASURING TESTING
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20210172825
- Publication date Jun 10, 2021
- Kokusai Electric Corporation
- Akinori TANAKA
- G01 - MEASURING TESTING
Information Patent Application
Vaporizer and Substrate Processing Apparatus
- Publication number 20190003047
- Publication date Jan 3, 2019
- Kokusai Electric Corporation
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180204720
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Akinori TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180204742
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Hideto TATENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HEAT INSULATING PIPE STRUCTURE
- Publication number 20180087709
- Publication date Mar 29, 2018
- Hitachi Kokusai Electric Inc.
- Mikio OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20130109193
- Publication date May 2, 2013
- Hitachi Kokusai Electric Inc.
- Takatomo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATTACHMENT FOR SUBSTRATES HAVING DIFFERENT DIAMETERS, SUBSTRATE PRO...
- Publication number 20120216743
- Publication date Aug 30, 2012
- Hitachi Kokusai Electric Inc.
- Takeshi Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20110306212
- Publication date Dec 15, 2011
- Hitachi Kokusai Electric Inc.
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20110210118
- Publication date Sep 1, 2011
- Hitachi Kokusai Electric Inc.
- Yukitomo HIROCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF HEAT TREATMENT
- Publication number 20100282166
- Publication date Nov 11, 2010
- Hitachi Kokusai Electric Inc.
- Masanao FUKUDA
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate Processing Apparatus and Semiconductor Device Manufacturi...
- Publication number 20090269933
- Publication date Oct 29, 2009
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20090197409
- Publication date Aug 6, 2009
- Hitachi Kokusai Electric Inc.
- Shinya MORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akinori Tanaka

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Method of manufacturing semiconductor device and non-transitory com...

Substrate temperature sensor, substrate retainer and substrate proc...

Substrate processing apparatus, substrate processing method and non...

Method of manufacturing semiconductor device and non-transitory com...

Substrate processing apparatus

Gas sampling cell

Substrate processing apparatus and semiconductor device manufacturi...

Substrate processing apparatus including shielding unit for suppres...

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

SUBSTRATE TEMPERATURE SENSOR, SUBSTRATE RETAINER AND SUBSTRATE PROC...

SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

Method of Manufacturing Semiconductor Device and Non-transitory Com...

SUBSTRATE PROCESSING APPARATUS, FURNACE OPENING ASSEMBLY, SUBSTRATE...

VAPORIZING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MAN...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Temperature Sensor, Substrate Retainer and Substrate Proc...

Method of Manufacturing Semiconductor Device and Non-transitory Com...

Vaporizer and Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND HEAT INSULATING PIPE STRUCTURE

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

ATTACHMENT FOR SUBSTRATES HAVING DIFFERENT DIAMETERS, SUBSTRATE PRO...

SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

HEAT TREATMENT APPARATUS AND METHOD OF HEAT TREATMENT

Substrate Processing Apparatus and Semiconductor Device Manufacturi...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...