Akinori TANAKA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus and liquid discharge evaluati...
- Patent number 12,269,052
- Issue date Apr 8, 2025
- Tokyo Electron Limited
- Terufumi Wakiyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 11,880,213
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Mikio Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, abnormality detection method, and storage medium
- Patent number 11,094,568
- Issue date Aug 17, 2021
- Tokyo Electron Limited
- Kenji Nakamizo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20210365054
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Mikio NAKASHIMA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND LIQUID DISCHARGE EVALUATI...
- Publication number 20210260612
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD, AND STORAGE MEDIUM
- Publication number 20180308730
- Publication date Oct 25, 2018
- TOKYO ELECTRON LIMITED
- Kenji NAKAMIZO
- G01 - MEASURING TESTING