Akio Akamatsu

Follow

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and article manufacturing method
- Patent number 11,531,276
- Issue date Dec 20, 2022
- Canon Kabushiki Kaisha
- Akio Akamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 11,181,825
- Issue date Nov 23, 2021
- Canon Kabushiki Kaisha
- Akihito Hashimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, measurement apparatus, exposure apparatus, met...
- Patent number 9,534,888
- Issue date Jan 3, 2017
- Canon Kabushiki Kaisha
- Akio Akamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 7,209,215
- Issue date Apr 24, 2007
- Canon Kabushiki Kaisha
- Akio Akamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20220137522
- Publication date May 5, 2022
- Canon Kabushiki Kaisha
- Akio Akamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20200371443
- Publication date Nov 26, 2020
- Canon Kabushiki Kaisha
- Akihito Hashimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, MET...
- Publication number 20160070175
- Publication date Mar 10, 2016
- Canon Kabushiki Kaisha
- Akio Akamatsu
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS, DETECTION METHOD, AND METHOD OF MANUFACTURING D...
- Publication number 20090168038
- Publication date Jul 2, 2009
- Canon Kabushiki Kaisha
- Akio Akamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE APPARATUS AND METHOD
- Publication number 20070019176
- Publication date Jan 25, 2007
- Akio Akamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY