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Akio Kanai
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Annaka, JP
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last 30 patents
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Patent Grant
Method for producing substrate to achieve semiconductor integrated...
Patent number
5,686,364
Issue date
Nov 11, 1997
Shin-Etsu Handotai Co., Ltd.
Konomu Ohki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of fabricating SOI substrate with uniform thin silicon film
Patent number
5,240,883
Issue date
Aug 31, 1993
Shin-Etsu Handotai Co., Ltd.
Takao Abe
H01 - BASIC ELECTRIC ELEMENTS