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Method for forming LSI pattern
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Publication number 20090019419
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Publication date Jan 15, 2009
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Matsushita Electric Industrial Co., Ltd.
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Akio Misaka
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G06 - COMPUTING CALCULATING COUNTING
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Mask data creation method
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Publication number 20080123935
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Publication date May 29, 2008
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Matsushita Electric Industrial Co., Ltd.
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Akio Misaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Pattern formation method
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Publication number 20080113304
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Publication date May 15, 2008
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Matsushita Electric Industrial Co., Ltd.
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Akio Misaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patterning method using photomask
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Publication number 20070224542
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Publication date Sep 27, 2007
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Matsushita Electric Industrial Co., Ltd.
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Akio Misaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Mask data creation method
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Publication number 20070141479
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Publication date Jun 21, 2007
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Matsushita Electric Industrial Co., Ltd.
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Akio Misaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method for forming generating mask data
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Publication number 20060183032
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Publication date Aug 17, 2006
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Matsushita Electric Industrial Co., Ltd.
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Akio Misaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method for forming pattern
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Publication number 20060183033
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Publication date Aug 17, 2006
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Matsushita Electric Industrial Co., Ltd.
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Akio Misaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Photomask
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Publication number 20060183034
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Publication date Aug 17, 2006
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Matsushita Electric Industrial Co., Ltd.
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Akio Misaka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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