Akio Nakamura

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Patents Grantslast 30 patents

Information Patent Grant
Electronic substrate processing system using portable closed contai...
- Patent number 5,746,008
- Issue date May 5, 1998
- Shinko Electric Co., Ltd.
- Teppei Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic substrate processing system using portable closed contai...
- Patent number 5,621,982
- Issue date Apr 22, 1997
- Shinko Electric Co., Ltd.
- Teppei Yamashita
- F26 - DRYING
Information Patent Grant
Gas purge unit for a portable container
- Patent number 5,433,574
- Issue date Jul 18, 1995
- Shinko Electric Co., Ltd.
- Hitoshi Kawano
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Article storage house in a clean room
- Patent number 5,363,867
- Issue date Nov 15, 1994
- Shinko Electric Co., Ltd.
- Hitoshi Kawano
- B08 - CLEANING