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Akira Doi
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Ibaraki-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and method
Patent number
6,846,363
Issue date
Jan 25, 2005
Hitachi, Ltd.
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
6,833,051
Issue date
Dec 21, 2004
Hitachi, Ltd.
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
6,756,737
Issue date
Jun 29, 2004
Hitachi, Ltd.
Akira Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
6,499,424
Issue date
Dec 31, 2002
Hitachi, Ltd.
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processsing apparatus
Patent number
6,481,370
Issue date
Nov 19, 2002
Hitachi, Ltd.
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
6,388,382
Issue date
May 14, 2002
Hitachi, Ltd.
Akira Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
6,180,019
Issue date
Jan 30, 2001
Hitachi, Ltd.
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma processing apparatus and method
Publication number
20020134510
Publication date
Sep 26, 2002
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20020125828
Publication date
Sep 12, 2002
Akira Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20020124963
Publication date
Sep 12, 2002
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20020084035
Publication date
Jul 4, 2002
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20010042595
Publication date
Nov 22, 2001
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20010040009
Publication date
Nov 15, 2001
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20010037857
Publication date
Nov 8, 2001
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20010037861
Publication date
Nov 8, 2001
Hideyuki Kazumi
H01 - BASIC ELECTRIC ELEMENTS