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Jena, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,901,524
Issue date
Dec 2, 2014
Gigaphoton Inc.
Takeshi Asayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser apparatus and extreme ultraviolet light source apparatus
Patent number
8,804,778
Issue date
Aug 12, 2014
Gigaphoton Inc.
Osamu Wakabayashi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Extreme ultraviolet light source apparatus and method of generating...
Patent number
8,604,453
Issue date
Dec 10, 2013
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,586,954
Issue date
Nov 19, 2013
Gigaphoton Inc.
Takeshi Asayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,513,630
Issue date
Aug 20, 2013
Gigaphoton Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source device, laser light source device...
Patent number
8,476,609
Issue date
Jul 2, 2013
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus and method of generating...
Patent number
8,455,850
Issue date
Jun 4, 2013
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus and method of generating...
Patent number
8,164,076
Issue date
Apr 24, 2012
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,158,959
Issue date
Apr 17, 2012
Gigaphoton Inc.
Takeshi Asayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source device, laser light source device...
Patent number
8,093,571
Issue date
Jan 10, 2012
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,067,756
Issue date
Nov 29, 2011
Gigaphoton, Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20140008554
Publication date
Jan 9, 2014
GIGAPHOTON INC.
Takeshi ASAYAMA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND METHOD OF GENERATING...
Publication number
20130256568
Publication date
Oct 3, 2013
GIGAPHOTON INC.
Akira Endo
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20120176036
Publication date
Jul 12, 2012
Gigaphoton Inc.
Takeshi ASAYAMA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND METHOD OF GENERATING...
Publication number
20120161040
Publication date
Jun 28, 2012
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20120097869
Publication date
Apr 26, 2012
Gigaphoton, Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, LASER LIGHT SOURCE DEVICE...
Publication number
20120068091
Publication date
Mar 22, 2012
GIGAPHOTON INC.
Akira Endo
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20100213395
Publication date
Aug 26, 2010
Yoshifumi UENO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20100193710
Publication date
Aug 5, 2010
Osamu Wakabayashi
B82 - NANO-TECHNOLOGY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND METHOD OF GENERATING...
Publication number
20100090133
Publication date
Apr 15, 2010
Akira ENDO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet light source device, laser light source device...
Publication number
20100078580
Publication date
Apr 1, 2010
GIGAPHOTON INC.
Akira Endo
G02 - OPTICS