Akira Fujita

Person

Nirasaki-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,133,297
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yoshifumi Amano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,935,739
- Issue date Mar 19, 2024
- Tokyo Electron Limited
- Akira Fujita
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,908,680
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching apparatus and etching method
- Patent number 11,164,760
- Issue date Nov 2, 2021
- Tokyo Electron Limited
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 11,024,519
- Issue date Jun 1, 2021
- Tokyo Electron Limited
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, liquid processing method, and stora...
- Patent number 10,643,835
- Issue date May 5, 2020
- Tokyo Electron Limited
- Akira Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,617,656
- Issue date Dec 31, 2013
- Tokyo Electron Limited
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240238848
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Takafumi KINOSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240153756
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240033766
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Akira FUJITA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220199400
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210098249
- Publication date Apr 1, 2021
- TOKYO ELECTRON LIMITED
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS AND ETCHING METHOD
- Publication number 20210005465
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200337118
- Publication date Oct 22, 2020
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20190067041
- Publication date Feb 28, 2019
- TOKYO ELECTRON LIMITED
- Akira Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20180204745
- Publication date Jul 19, 2018
- TOKYO ELECTRON LIMITED
- Akira FUJITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORA...
- Publication number 20170287699
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Akira Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20100330283
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Mitsunori NAKAMORI
- H01 - BASIC ELECTRIC ELEMENTS

Akira Fujita

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Etching apparatus and etching method

Substrate processing apparatus, substrate processing method and com...

Substrate processing apparatus, liquid processing method, and stora...

Liquid processing apparatus, liquid processing method, and storage...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ETCHING APPARATUS AND ETCHING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...

SUBSTRATE PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORA...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...