Akira Fukuda

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Dressing method, method of determining dressing conditions, program...
- Patent number 8,965,555
- Issue date Feb 24, 2015
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing method, method of determining dressing conditions, program...
- Patent number 8,655,478
- Issue date Feb 18, 2014
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,002,607
- Issue date Aug 23, 2011
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 7,976,358
- Issue date Jul 12, 2011
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 7,967,660
- Issue date Jun 28, 2011
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Microfluidic treatment method and device
- Patent number 7,588,671
- Issue date Sep 15, 2009
- Ebara Corporation
- Tomoyuki Morita
- G01 - MEASURING TESTING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,361,076
- Issue date Apr 22, 2008
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,234,999
- Issue date Jun 26, 2007
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,150,673
- Issue date Dec 19, 2006
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Beam source and beam processing apparatus
- Patent number 7,078,862
- Issue date Jul 18, 2006
- Ebara Corporation
- Akira Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam source and beam processing apparatus
- Patent number 7,034,285
- Issue date Apr 25, 2006
- Ebara Corporation
- Katsunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM...
- Publication number 20140120808
- Publication date May 1, 2014
- EBARA CORPORATION
- Akira FUKUDA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20130220382
- Publication date Aug 29, 2013
- EBARA CORPORATION
- Akira FUKUDA
- B08 - CLEANING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20110014851
- Publication date Jan 20, 2011
- Akira FUKUDA
- B24 - GRINDING POLISHING
Information Patent Application
DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM...
- Publication number 20100081361
- Publication date Apr 1, 2010
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20100076588
- Publication date Mar 25, 2010
- Akira FUKUDA
- B24 - GRINDING POLISHING
Information Patent Application
Polishing Apparatus and Polishing Method
- Publication number 20090239446
- Publication date Sep 24, 2009
- EBARA CORPORATION
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and method for forming magnetic film
- Publication number 20080176008
- Publication date Jul 24, 2008
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Polishing Apparatus and Polishing Method
- Publication number 20070254558
- Publication date Nov 1, 2007
- Masako Kodera
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus
- Publication number 20070232203
- Publication date Oct 4, 2007
- Akira Fukuda
- B08 - CLEANING
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20070224916
- Publication date Sep 27, 2007
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20070205112
- Publication date Sep 6, 2007
- Masako Kodera
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20070061036
- Publication date Mar 15, 2007
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20060009127
- Publication date Jan 12, 2006
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Microfluidic treatment method and device
- Publication number 20050161326
- Publication date Jul 28, 2005
- Tomoyuki Morita
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Beam source and beam processing apparatus
- Publication number 20040222367
- Publication date Nov 11, 2004
- Katsunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam source and beam processing apparatus
- Publication number 20040221815
- Publication date Nov 11, 2004
- Akira Fukuda
- H01 - BASIC ELECTRIC ELEMENTS

Akira Fukuda

Person

Patents Grantslast 30 patents

Dressing method, method of determining dressing conditions, program...

Dressing method, method of determining dressing conditions, program...

Polishing apparatus and polishing method

Polishing apparatus and polishing method

Polishing apparatus and polishing method

Microfluidic treatment method and device

Method for estimating polishing profile or polishing amount, polish...

Method for estimating polishing profile or polishing amount, polish...

Method for estimating polishing profile or polishing amount, polish...

Beam source and beam processing apparatus

Beam source and beam processing apparatus

Patents Applicationslast 30 patents

DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM...

SUBSTRATE PROCESSING METHOD

POLISHING APPARATUS AND POLISHING METHOD

DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM...

POLISHING APPARATUS AND POLISHING METHOD

Polishing Apparatus and Polishing Method

Apparatus and method for forming magnetic film

Polishing Apparatus and Polishing Method

Polishing method and polishing apparatus

Method for estimating polishing profile or polishing amount, polish...

Polishing apparatus and polishing method

Method for estimating polishing profile or polishing amount, polish...

Method for estimating polishing profile or polishing amount, polish...

Microfluidic treatment method and device

Beam source and beam processing apparatus

Beam source and beam processing apparatus