Akira Fukunaga

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plating apparatus and plating method
- Patent number 8,784,636
- Issue date Jul 22, 2014
- Ebara Corporation
- Mizuki Nagai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 8,211,242
- Issue date Jul 3, 2012
- Ebara Corporation
- Yuki Inoue
- B08 - CLEANING
Information Patent Grant
Method and apparatus for forming metal film
- Patent number 7,498,261
- Issue date Mar 3, 2009
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 7,407,821
- Issue date Aug 5, 2008
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interconnects forming method and interconnects forming apparatus
- Patent number 7,374,584
- Issue date May 20, 2008
- Ebara Corporation
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing substrate
- Patent number 7,285,492
- Issue date Oct 23, 2007
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of polishing thin film formed on substrate
- Patent number 7,262,849
- Issue date Aug 28, 2007
- Ebara Corporation
- Shohei Shima
- B24 - GRINDING POLISHING
Information Patent Grant
Interconnects forming method and interconnects forming apparatus
- Patent number 7,217,653
- Issue date May 15, 2007
- Ebara Corporation
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming thin metal films on substrates
- Patent number 7,179,503
- Issue date Feb 20, 2007
- Ebara Corporation
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding unit, processing apparatus and holding method of substrates
- Patent number 7,055,535
- Issue date Jun 6, 2006
- Ebara Corporation
- Junji Kunisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming thin film of metal
- Patent number 6,972,256
- Issue date Dec 6, 2005
- Ebara Corporation
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive probe chip, composite substrate and method for fabrication...
- Patent number 6,897,021
- Issue date May 24, 2005
- Ebara Corporation
- Hiroshi Nagasawa
- G01 - MEASURING TESTING
Information Patent Grant
Electrolytic machining method and apparatus
- Patent number 6,875,335
- Issue date Apr 5, 2005
- Ebara Corporation
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Composite metallic ultrafine particles and process for producing th...
- Patent number 6,871,773
- Issue date Mar 29, 2005
- Ebara Corp.
- Akira Fukunaga
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method and apparatus of producing thin film of metal or metal compound
- Patent number 6,780,245
- Issue date Aug 24, 2004
- Ebara Corporation
- Kuniaki Horie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for etching ruthenium films
- Patent number 6,776,919
- Issue date Aug 17, 2004
- Ebara Corporation
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of and apparatus for cleaning substrate
- Patent number 6,745,784
- Issue date Jun 8, 2004
- Ebara Corporation
- Ichiro Katakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite metallic ultrafine particles and process for producing th...
- Patent number 6,743,395
- Issue date Jun 1, 2004
- Ebara Corporation
- Akira Fukunaga
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Plating apparatus and method of managing plating liquid composition
- Patent number 6,740,242
- Issue date May 25, 2004
- Ebara Corporation
- Akira Fukunaga
- G01 - MEASURING TESTING
Information Patent Grant
Method of and apparatus for forming interconnection
- Patent number 6,730,596
- Issue date May 4, 2004
- Ebara Corporation
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, interconnection forming method, and apparatus for c...
- Patent number 6,709,555
- Issue date Mar 23, 2004
- Ebara Corporation
- Naoaki Ogure
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrolytic machining method and apparatus
- Patent number 6,602,396
- Issue date Aug 5, 2003
- Ebara Corporation
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of and apparatus for cleaning substrate
- Patent number 6,558,478
- Issue date May 6, 2003
- Ebara Corporation
- Ichiro Katakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas polishing method, gas polishing nozzle and polishing apparatus
- Patent number 6,554,205
- Issue date Apr 29, 2003
- Ebara Corporation
- Syuhei Shinozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for mounting semiconductor device
- Patent number 6,519,842
- Issue date Feb 18, 2003
- Ebara Corporation
- Akira Fukunaga
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus of producing thin film of metal or metal compound
- Patent number 6,517,642
- Issue date Feb 11, 2003
- Ebara Corporation
- Kuniaki Horie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and nozzle device for gaseous polishing
- Patent number 6,447,632
- Issue date Sep 10, 2002
- Ebara Corporation
- Shyuhei Shinozuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrolytic machining method and apparatus
- Patent number 6,368,493
- Issue date Apr 9, 2002
- Ebara Corporation
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas polishing apparatus and method
- Patent number 6,315,858
- Issue date Nov 13, 2001
- Ebara Corporation
- Shyuhei Shinozuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas polishing method
- Patent number 6,136,213
- Issue date Oct 24, 2000
- Ebara Corporation
- Syuhei Shinozuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20240087963
- Publication date Mar 14, 2024
- EBARA CORPORATION
- Akira FUKUNAGA
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANIN...
- Publication number 20240050991
- Publication date Feb 15, 2024
- EBARA CORPORATION
- Megumi UNO
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING WASHING TOOL, SUBSTRATE WASHING D...
- Publication number 20240024928
- Publication date Jan 25, 2024
- EBARA CORPORATION
- Megumi UNO
- B08 - CLEANING
Information Patent Application
INFORMATION PROCESSING APPARATUS AND STORAGE MEDIUM
- Publication number 20220292889
- Publication date Sep 15, 2022
- Honda Motor Co., Ltd.
- Yoshimori Tanizawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20210166967
- Publication date Jun 3, 2021
- EBARA CORPORATION
- Akira FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210039142
- Publication date Feb 11, 2021
- EBARA CORPORATION
- Chikako TAKATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING CONDUCTIVE STRUCTURE, AND PLATING APPARATUS AND...
- Publication number 20140287580
- Publication date Sep 25, 2014
- Mizuki Nagai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20130220382
- Publication date Aug 29, 2013
- EBARA CORPORATION
- Akira FUKUDA
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20100105154
- Publication date Apr 29, 2010
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PRO...
- Publication number 20100075498
- Publication date Mar 25, 2010
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Polishing method and apparatus
- Publication number 20090197510
- Publication date Aug 6, 2009
- Shohei Shima
- B24 - GRINDING POLISHING
Information Patent Application
Plating apparatus and plating method
- Publication number 20090139870
- Publication date Jun 4, 2009
- Mizuki Nagai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing method and apparatus
- Publication number 20090000549
- Publication date Jan 1, 2009
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method, Substrate Processing Apparatus, and Co...
- Publication number 20080314870
- Publication date Dec 25, 2008
- Yuki Inoue
- B08 - CLEANING
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20080138508
- Publication date Jun 12, 2008
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same, and Pro...
- Publication number 20080067679
- Publication date Mar 20, 2008
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Apparatus
- Publication number 20080047583
- Publication date Feb 28, 2008
- Akira Fukunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing substrate
- Publication number 20080000776
- Publication date Jan 3, 2008
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20070289604
- Publication date Dec 20, 2007
- Yukio Fukunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing Apparatus and Polishing Method
- Publication number 20070254558
- Publication date Nov 1, 2007
- Masako Kodera
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus
- Publication number 20070243797
- Publication date Oct 18, 2007
- Akira Fukunaga
- B24 - GRINDING POLISHING
Information Patent Application
Interconnects forming method and interconnects forming apparatus
- Publication number 20070228569
- Publication date Oct 4, 2007
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20070205112
- Publication date Sep 6, 2007
- Masako Kodera
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of forming thin metal films on substrates
- Publication number 20070141251
- Publication date Jun 21, 2007
- EBARA CORPORATION
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Polishing method, polishing apparatus, and electrolytic polishing a...
- Publication number 20070099426
- Publication date May 3, 2007
- Manabu Tsujimura
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for forming interconnects
- Publication number 20060086618
- Publication date Apr 27, 2006
- Akira Fukunaga
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for forming metal film
- Publication number 20060057839
- Publication date Mar 16, 2006
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of and apparatus for manufacturing semiconductor device
- Publication number 20060003521
- Publication date Jan 5, 2006
- Akira Fukunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming protective film and electroless plating bath
- Publication number 20050282384
- Publication date Dec 22, 2005
- Hidemi Nawafune
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Interconnects forming method and interconnects forming apparatus
- Publication number 20050282378
- Publication date Dec 22, 2005
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akira Fukunaga

Person

Patents Grantslast 30 patents

Plating apparatus and plating method

Substrate processing method, substrate processing apparatus, and co...

Method and apparatus for forming metal film

Substrate processing method

Interconnects forming method and interconnects forming apparatus

Method for processing substrate

Method of polishing thin film formed on substrate

Interconnects forming method and interconnects forming apparatus

Method of forming thin metal films on substrates

Holding unit, processing apparatus and holding method of substrates

Method and apparatus for forming thin film of metal

Reactive probe chip, composite substrate and method for fabrication...

Electrolytic machining method and apparatus

Composite metallic ultrafine particles and process for producing th...

Method and apparatus of producing thin film of metal or metal compound

Method and apparatus for etching ruthenium films

Method of and apparatus for cleaning substrate

Composite metallic ultrafine particles and process for producing th...

Plating apparatus and method of managing plating liquid composition

Method of and apparatus for forming interconnection

Plating method, interconnection forming method, and apparatus for c...

Electrolytic machining method and apparatus

Method of and apparatus for cleaning substrate

Gas polishing method, gas polishing nozzle and polishing apparatus

Method for mounting semiconductor device

Method and apparatus of producing thin film of metal or metal compound

Apparatus and nozzle device for gaseous polishing

Electrolytic machining method and apparatus

Gas polishing apparatus and method

Gas polishing method

Patents Applicationslast 30 patents

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANIN...

METHOD AND APPARATUS FOR CLEANING WASHING TOOL, SUBSTRATE WASHING D...

INFORMATION PROCESSING APPARATUS AND STORAGE MEDIUM

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

METHOD FOR FORMING CONDUCTIVE STRUCTURE, AND PLATING APPARATUS AND...

SUBSTRATE PROCESSING METHOD

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PRO...

Polishing method and apparatus

Plating apparatus and plating method

Substrate processing method and apparatus

Substrate Processing Method, Substrate Processing Apparatus, and Co...

Substrate Processing Method and Substrate Processing Apparatus

Semiconductor Device and Method for Manufacturing the Same, and Pro...

Substrate Processing Method and Apparatus

Method and apparatus for processing substrate

Substrate Processing Apparatus

Polishing Apparatus and Polishing Method

Polishing method and polishing apparatus

Interconnects forming method and interconnects forming apparatus

Polishing apparatus and polishing method

Method of forming thin metal films on substrates

Polishing method, polishing apparatus, and electrolytic polishing a...

Method and apparatus for forming interconnects

Method and apparatus for forming metal film

Method of and apparatus for manufacturing semiconductor device

Method for forming protective film and electroless plating bath

Interconnects forming method and interconnects forming apparatus