Akira Fukutomi

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Separation apparatus, separation system, and separation method
- Patent number 10,071,544
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Peeling system
- Patent number 9,595,462
- Issue date Mar 14, 2017
- Tokyo Electron Limited
- Takeshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus and substrate holding method
- Patent number 9,343,349
- Issue date May 17, 2016
- Tokyo Electron Limited
- Yasuharu Iwashita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate inverting device, substrate inverting method, and peeling...
- Patent number 8,997,822
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet-processing apparatus
- Patent number 8,356,951
- Issue date Jan 22, 2013
- Tokyo Electron Limited
- Yasuaki Noda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 7,179,504
- Issue date Feb 20, 2007
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 6,824,616
- Issue date Nov 30, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing unit
- Patent number 6,773,510
- Issue date Aug 10, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEPARATING METHOD, SEPARATING APPARATUS, AND SEPARATING SYSTEM
- Publication number 20230055853
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Takashi Terada
- B32 - LAYERED PRODUCTS
Information Patent Application
PEELING SYSTEM
- Publication number 20150136331
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Takeshi Tamura
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE INVERTING DEVICE, SUBSTRATE INVERTING METHOD, AND PEELING...
- Publication number 20130292062
- Publication date Nov 7, 2013
- TOKYO ELECTRON LIMITED
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD
- Publication number 20130264780
- Publication date Oct 10, 2013
- TOKYO ELECTRON LIMITED
- Yasuharu IWASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEPARATION APPARATUS, SEPARATION SYSTEM, AND SEPARATION METHOD
- Publication number 20130146228
- Publication date Jun 13, 2013
- TOKYO ELECTRON LIMITED
- Osamu HIRAKAWA
- B32 - LAYERED PRODUCTS
Information Patent Application
WET-PROCESSING APPARATUS
- Publication number 20110286738
- Publication date Nov 24, 2011
- TOKYO ELECTRON LIMITED
- Yasuaki Noda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing system
- Publication number 20050100679
- Publication date May 12, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing unit
- Publication number 20020148566
- Publication date Oct 17, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing system
- Publication number 20020150691
- Publication date Oct 17, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS

Akira Fukutomi

Person

Patents Grantslast 30 patents

Separation apparatus, separation system, and separation method

Peeling system

Substrate holding apparatus and substrate holding method

Substrate inverting device, substrate inverting method, and peeling...

Wet-processing apparatus

Substrate processing method and substrate processing system

Substrate processing method and substrate processing system

Substrate processing unit

Patents Applicationslast 30 patents

SEPARATING METHOD, SEPARATING APPARATUS, AND SEPARATING SYSTEM

PEELING SYSTEM

SUBSTRATE INVERTING DEVICE, SUBSTRATE INVERTING METHOD, AND PEELING...

SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD

SEPARATION APPARATUS, SEPARATION SYSTEM, AND SEPARATION METHOD

WET-PROCESSING APPARATUS

Substrate processing method and substrate processing system

Substrate processing unit

Substrate processing method and substrate processing system