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Akira Hamamatsu
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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Defect classification device, inspection device, and inspection system
Patent number
11,442,024
Issue date
Sep 13, 2022
Hitachi High-Technologies Corporation
Takanori Kondo
G01 - MEASURING TESTING
Information
Patent Grant
Inspection device and inspection method thereof
Patent number
11,346,791
Issue date
May 31, 2022
HITACHI HIGH-TECH CORPORATION
Masami Makuuchi
G01 - MEASURING TESTING
Information
Patent Grant
Examination device
Patent number
10,401,304
Issue date
Sep 3, 2019
Hitachi High-Technologies Corporation
Masami Makuuchi
G01 - MEASURING TESTING
Information
Patent Grant
Inspection device
Patent number
10,261,027
Issue date
Apr 16, 2019
Hitachi High-Technologies Corporation
Yoshio Kimoto
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting method and defect inspecting apparatus
Patent number
10,254,235
Issue date
Apr 9, 2019
Hitachi High-Technologies Corporation
Toshiyuki Nakao
G01 - MEASURING TESTING
Information
Patent Grant
Examination device
Patent number
10,107,762
Issue date
Oct 23, 2018
Hitachi High-Technologies Corporation
Masami Makuuchi
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting method and defect inspecting apparatus
Patent number
9,841,384
Issue date
Dec 12, 2017
Hitachi High-Technologies Corporation
Toshiyuki Nakao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Defect inspection device and defect inspection method
Patent number
9,645,094
Issue date
May 9, 2017
Hitachi High-Technologies Corporation
Toshifumi Honda
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus and defect inspection method
Patent number
9,588,055
Issue date
Mar 7, 2017
Hitachi High-Technologies Corporation
Yuta Urano
G01 - MEASURING TESTING
Information
Patent Grant
Inspection device
Patent number
9,568,437
Issue date
Feb 14, 2017
Hitachi High-Technologies Corporation
Shunichi Matsumoto
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection device and defect inspection method
Patent number
9,568,439
Issue date
Feb 14, 2017
Hitachi High-Technologies Corporation
Toshifumi Honda
G01 - MEASURING TESTING
Information
Patent Grant
Shape measurement method, and system therefor
Patent number
9,354,049
Issue date
May 31, 2016
HUTACHI HIGH-TECHNOLOGIES CORPORATION
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection device and defect inspection method
Patent number
9,329,136
Issue date
May 3, 2016
Hitachi High-Technologies Corporation
Toshifumi Honda
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting method and defect inspecting apparatus
Patent number
9,228,960
Issue date
Jan 5, 2016
Hitachi High-Technologies Corporation
Toshiyuki Nakao
G01 - MEASURING TESTING
Information
Patent Grant
Inspecting apparatus and an inspecting method
Patent number
8,831,899
Issue date
Sep 9, 2014
Hitachi High-Technologies Corporation
Kazunori Nemoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Defect inspection method and apparatus
Patent number
8,755,041
Issue date
Jun 17, 2014
Hitachi High-Technologies Corporation
Yuta Urano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Defect classification method and apparatus, and defect inspection a...
Patent number
8,660,340
Issue date
Feb 25, 2014
Hitachi High-Technologies Corporation
Hisae Shibuya
G01 - MEASURING TESTING
Information
Patent Grant
Inspecting method and inspecting apparatus for substrate surface
Patent number
8,654,350
Issue date
Feb 18, 2014
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus of inspecting defect in semiconductor and method of the same
Patent number
8,643,834
Issue date
Feb 4, 2014
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting method and defect inspecting apparatus
Patent number
8,638,429
Issue date
Jan 28, 2014
Hitachi High-Technologies Corporation
Toshiyuki Nakao
G01 - MEASURING TESTING
Information
Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
Patent number
8,559,000
Issue date
Oct 15, 2013
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Defects inspecting apparatus and defects inspecting method
Patent number
8,508,727
Issue date
Aug 13, 2013
Hitachi High-Technologies Corporation
Sachio Uto
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus
Patent number
8,477,302
Issue date
Jul 2, 2013
Hitachi High-Technologies Corporation
Yuta Urano
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for detecting defects
Patent number
8,462,330
Issue date
Jun 11, 2013
Hitachi High-Technologies Corporation
Hiroyuki Nakano
G01 - MEASURING TESTING
Information
Patent Grant
Defect classification method and apparatus, and defect inspection a...
Patent number
8,437,534
Issue date
May 7, 2013
Hitachi High-Technologies Corporation
Hisae Shibuya
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection method and apparatus
Patent number
8,427,634
Issue date
Apr 23, 2013
Hitachi High-Technologies Corporation
Yuta Urano
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus and its method
Patent number
8,355,123
Issue date
Jan 15, 2013
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus of inspecting defect in semiconductor and method of the same
Patent number
8,310,666
Issue date
Nov 13, 2012
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Inspecting method and inspecting apparatus for substrate surface
Patent number
8,310,665
Issue date
Nov 13, 2012
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for detecting pattern defects
Patent number
8,306,312
Issue date
Nov 6, 2012
Hitachi High-Technologies Corporation
Hisae Shibuya
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD THEREOF
Publication number
20200393388
Publication date
Dec 17, 2020
Hitachi High-Tech Corporation
Masami Makuuchi
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION DEVICE
Publication number
20200371047
Publication date
Nov 26, 2020
Hitachi High-Tech Corporation
Toshifumi Honda
G01 - MEASURING TESTING
Information
Patent Application
Defect Classification Device, Inspection Device, and Inspection System
Publication number
20200256807
Publication date
Aug 13, 2020
Hitachi High-Technologies Corporation
Takanori KONDO
G01 - MEASURING TESTING
Information
Patent Application
EXAMINATION DEVICE
Publication number
20190033228
Publication date
Jan 31, 2019
Hitachi High-Technologies Corporation
Masami MAKUUCHI
G01 - MEASURING TESTING
Information
Patent Application
Inspection Device
Publication number
20180088055
Publication date
Mar 29, 2018
Hitachi High-Technologies Corporation
Yoshio KIMOTO
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
Publication number
20180067060
Publication date
Mar 8, 2018
Hitachi High-Technologies Corporation
Toshiyuki Nakao
G01 - MEASURING TESTING
Information
Patent Application
EXAMINATION DEVICE
Publication number
20180017502
Publication date
Jan 18, 2018
Hitachi High-Technologies Corporation
Masami MAKUUCHI
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
Publication number
20170102339
Publication date
Apr 13, 2017
Hitachi High-Technologies Corporation
Toshifumi Honda
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
Publication number
20160216217
Publication date
Jul 28, 2016
Hitachi High-Technologies Corporation
Toshifumi Honda
G01 - MEASURING TESTING
Information
Patent Application
Inspection Device
Publication number
20160139059
Publication date
May 19, 2016
Hitachi High-Technologies Corporation
Shunichi MATSUMOTO
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
Publication number
20160116421
Publication date
Apr 28, 2016
Hitachi High-Technologies Corporation
Toshiyuki Nakao
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
Publication number
20150146200
Publication date
May 28, 2015
Hitachi High-Technologies Corporation
Toshifumi Honda
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
Publication number
20150062581
Publication date
Mar 5, 2015
Hitachi High-Technologies Corporation
Yuta Urano
G01 - MEASURING TESTING
Information
Patent Application
Defect Inspecting Method and Defect Inspecting Apparatus
Publication number
20140125980
Publication date
May 8, 2014
Hitachi High-Technologies Corporation
Toshiyuki Nakao
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION METHOD AND APPARATUS
Publication number
20130343632
Publication date
Dec 26, 2013
Hitachi High-Technologies Corporation
Yuta URANO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SHAPE MEASUREMENT METHOD, AND SYSTEM THEREFOR
Publication number
20130262027
Publication date
Oct 3, 2013
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Application
DEFECT CLASSIFICATION METHOD AND APPARATUS, AND DEFECT INSPECTION A...
Publication number
20130202189
Publication date
Aug 8, 2013
Hitachi High-Technologies Corporation
Hisae Shibuya
G01 - MEASURING TESTING
Information
Patent Application
Inspecting Method and Inspecting Apparatus For Substrate Surface
Publication number
20130107247
Publication date
May 2, 2013
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS OF INSPECTING DEFECT IN SEMICONDUCTOR AND METHOD OF THE SAME
Publication number
20130038862
Publication date
Feb 14, 2013
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
Publication number
20120312104
Publication date
Dec 13, 2012
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
Publication number
20120262709
Publication date
Oct 18, 2012
Sachio Uto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS
Publication number
20120194809
Publication date
Aug 2, 2012
Hiroyuki Nakano
G01 - MEASURING TESTING
Information
Patent Application
Inspecting Method and Inspecting Apparatus for Substrate Surface
Publication number
20120162665
Publication date
Jun 28, 2012
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION APPARATUS AND ITS METHOD
Publication number
20120133927
Publication date
May 31, 2012
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
Publication number
20120133929
Publication date
May 31, 2012
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
Method and Its Apparatus for Inspecting Particles or Defects of a S...
Publication number
20120062890
Publication date
Mar 15, 2012
Hitachi High-Technologies Corporation
Hidetoshi Nishiyama
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
Publication number
20120019835
Publication date
Jan 26, 2012
Toshiyuki Nakao
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
Publication number
20120006131
Publication date
Jan 12, 2012
Akira Hamamatsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
Publication number
20110310382
Publication date
Dec 22, 2011
Sachio Uto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
REFERENCE WAFER FOR CALIBRATION OF DARK-FIELD INSPECTION APPARATUS,...
Publication number
20110276299
Publication date
Nov 10, 2011
Kazunori Nemoto
G01 - MEASURING TESTING