Akira HIDAKA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method
- Patent number 9,805,945
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Akira Hidaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD
- Publication number 20160379841
- Publication date Dec 29, 2016
- TOKYO ELECTRON LIMITED
- Akira HIDAKA
- H01 - BASIC ELECTRIC ELEMENTS