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Akira Ihsikawa
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Polishing body, polishing apparatus, polishing apparatus adjustment...
Patent number
6,458,014
Issue date
Oct 1, 2002
Nikon Corporation
Akira Ihsikawa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Polishing body, polishing apparatus, polishing apparatus adjustment...
Publication number
20020042243
Publication date
Apr 11, 2002
Akira Ihsikawa
B24 - GRINDING POLISHING