Akira Ikegami

Person

Hitachi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device
- Patent number 12,125,667
- Issue date Oct 22, 2024
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source and charged particle beam device
- Patent number 11,929,230
- Issue date Mar 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Keigo Kasuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam application apparatus
- Patent number 11,915,903
- Issue date Feb 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,791,124
- Issue date Oct 17, 2023
- Hitachi High-Technologies Corporation
- Yuta Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,784,023
- Issue date Oct 10, 2023
- Hitachi High-Technologies Corporation
- Yuta Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam irradiation device
- Patent number 11,239,042
- Issue date Feb 1, 2022
- HITACHI HIGH-TECH CORPORATION
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and electrostatic lens
- Patent number 11,201,033
- Issue date Dec 14, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuta Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam application apparatus
- Patent number 11,177,108
- Issue date Nov 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam device
- Patent number 11,056,310
- Issue date Jul 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuta Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam irradiation device
- Patent number 10,832,886
- Issue date Nov 10, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,559,450
- Issue date Feb 11, 2020
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,304,654
- Issue date May 28, 2019
- Hitachi High-Technologies Corporation
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 9,997,326
- Issue date Jun 12, 2018
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,941,095
- Issue date Apr 10, 2018
- Hitachi High-Technologies Corporation
- Ryota Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam application device
- Patent number 9,704,687
- Issue date Jul 11, 2017
- Hitachi High-Technologies Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle-beam device
- Patent number 9,653,256
- Issue date May 16, 2017
- Hitachi High-Technologies Corporation
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and trajectory correction method in...
- Patent number 9,484,181
- Issue date Nov 1, 2016
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,384,940
- Issue date Jul 5, 2016
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample electrification measurement method and charged particle beam...
- Patent number 8,835,844
- Issue date Sep 16, 2014
- Hitachi, Ltd.
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting information of an electric potential on a samp...
- Patent number 8,766,182
- Issue date Jul 1, 2014
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,729,491
- Issue date May 20, 2014
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,487,253
- Issue date Jul 16, 2013
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting information of an electronic potential on a sa...
- Patent number 8,487,250
- Issue date Jul 16, 2013
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,481,935
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting and measuring sample and scanning electron mi...
- Patent number 8,481,934
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope having time constant measurement capab...
- Patent number 8,274,048
- Issue date Sep 25, 2012
- Hitachi High-Technologies Corporation
- Akira Ikegami
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting information of an electric potential on a samp...
- Patent number 8,263,934
- Issue date Sep 11, 2012
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,080,790
- Issue date Dec 20, 2011
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,989,768
- Issue date Aug 2, 2011
- Hitachi High-Technologies Corporation
- Akira Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting and measuring sample and scanning electron mi...
- Patent number 7,960,696
- Issue date Jun 14, 2011
- Hitachi High-Technologies Corporation
- Makoto Ezumi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220328281
- Publication date Oct 13, 2022
- Hitachi High-Tech Corporation
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION APPARATUS
- Publication number 20220319798
- Publication date Oct 6, 2022
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20220199349
- Publication date Jun 23, 2022
- HITACHI HIGH-TECH CORPORATION
- Keigo KASUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20210398770
- Publication date Dec 23, 2021
- Hitachi High-Technologies Corporation
- Yuta KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20210233738
- Publication date Jul 29, 2021
- Yuta Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Irradiation Device
- Publication number 20210027976
- Publication date Jan 28, 2021
- HITACHI HIGH-TECH CORPORATION
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPLICATION APPARATUS
- Publication number 20210005417
- Publication date Jan 7, 2021
- Hitachi High-Tech Corporation
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20200294757
- Publication date Sep 17, 2020
- Hitachi High-Technologies Corporation
- Yuta KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Electrostatic Lens
- Publication number 20200185186
- Publication date Jun 11, 2020
- Hitachi High-Technologies Corporation
- Yuta KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-Particle Beam Device
- Publication number 20190393014
- Publication date Dec 26, 2019
- Hitachi High-Technologies Corporation
- Yuta KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Irradiation Device
- Publication number 20190287754
- Publication date Sep 19, 2019
- Hitachi High-Technologies Corporation
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20190074159
- Publication date Mar 7, 2019
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20180233320
- Publication date Aug 16, 2018
- Hitachi High-Technologies Corporation
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20160379795
- Publication date Dec 29, 2016
- Hitachi High-Technologies Corporation
- Ryota WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-Particle-Beam Device
- Publication number 20160300690
- Publication date Oct 13, 2016
- Hitachi High-Technologies Corporation
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20160217967
- Publication date Jul 28, 2016
- Hitachi High-Technologies Corporation
- Hideto DOHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPLICATION DEVICE
- Publication number 20150364290
- Publication date Dec 17, 2015
- Hitachi High-Technologies Corporation
- Momoyo ENYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Trajectory Correction Method in...
- Publication number 20150357155
- Publication date Dec 10, 2015
- Hitachi High-Technologies Corporation
- Hideto DOHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150294833
- Publication date Oct 15, 2015
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140021366
- Publication date Jan 23, 2014
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...
- Publication number 20140001359
- Publication date Jan 2, 2014
- Hitachi High-Technologies Corporation
- Makoto EZUMI
- G01 - MEASURING TESTING
Information Patent Application
Method for Detecting Information of an Electric Potential on a Samp...
- Publication number 20130284921
- Publication date Oct 31, 2013
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Application
Method for Detecting Information of an Electronic Potential on a Sa...
- Publication number 20120298863
- Publication date Nov 29, 2012
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20120061566
- Publication date Mar 15, 2012
- Hitachi High-Technologies Corporation
- Minoru YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20110278454
- Publication date Nov 17, 2011
- Hitachi High-Technologies Corporation
- Akira IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...
- Publication number 20110215243
- Publication date Sep 8, 2011
- Hitachi High-Technologies Corporation
- Makoto EZUMI
- G01 - MEASURING TESTING
Information Patent Application
Sample Electrification Measurement Method and Charged Particle Beam...
- Publication number 20100294929
- Publication date Nov 25, 2010
- Makoto Ezumi
- G01 - MEASURING TESTING
Information Patent Application
Scanning Electron Microscope Having Time Constant Measurement Capab...
- Publication number 20100258723
- Publication date Oct 14, 2010
- Hitachi High-Technologies Corporation
- Akira IKEGAMI
- G01 - MEASURING TESTING
Information Patent Application
Method for Detecting Information of an Electric Potential on a Samp...
- Publication number 20090272899
- Publication date Nov 5, 2009
- Hitachi High-Technologies Corporation
- Minoru YAMAZAKI
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090224170
- Publication date Sep 10, 2009
- Minoru YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS

Akira Ikegami

Person

Patents Grantslast 30 patents

Charged particle beam device

Electron source and charged particle beam device

Electron beam application apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Beam irradiation device

Charged particle beam device and electrostatic lens

Charged particle beam application apparatus

Charged-particle beam device

Beam irradiation device

Scanning electron microscope

Charged particle beam device

Charged particle beam device

Charged particle beam apparatus

Charged particle beam application device

Charged particle-beam device

Charged particle beam apparatus and trajectory correction method in...

Charged particle beam apparatus

Sample electrification measurement method and charged particle beam...

Method for detecting information of an electric potential on a samp...

Charged particle beam apparatus

Scanning electron microscope

Method for detecting information of an electronic potential on a sa...

Scanning electron microscope

Method for inspecting and measuring sample and scanning electron mi...

Scanning electron microscope having time constant measurement capab...

Method for detecting information of an electric potential on a samp...

Scanning electron microscope

Scanning electron microscope

Method for inspecting and measuring sample and scanning electron mi...

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE

ELECTRON BEAM APPLICATION APPARATUS

ELECTRON SOURCE AND CHARGED PARTICLE BEAM DEVICE

Charged Particle Beam Apparatus

Charged Particle Beam Apparatus

Beam Irradiation Device

CHARGED PARTICLE BEAM APPLICATION APPARATUS

Charged Particle Beam Apparatus

Charged Particle Beam Device and Electrostatic Lens

Charged-Particle Beam Device

Beam Irradiation Device

SCANNING ELECTRON MICROSCOPE

Charged Particle Beam Device

Charged Particle Beam Apparatus

Charged-Particle-Beam Device

Charged Particle Beam Device

CHARGED PARTICLE BEAM APPLICATION DEVICE

Charged Particle Beam Apparatus and Trajectory Correction Method in...

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS

METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...

Method for Detecting Information of an Electric Potential on a Samp...

Method for Detecting Information of an Electronic Potential on a Sa...

SCANNING ELECTRON MICROSCOPE

SCANNING ELECTRON MICROSCOPE

METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MI...

Sample Electrification Measurement Method and Charged Particle Beam...

Scanning Electron Microscope Having Time Constant Measurement Capab...

Method for Detecting Information of an Electric Potential on a Samp...

SCANNING ELECTRON MICROSCOPE