Akira Ishihara

Follow

Person

Tosu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning processing system and cleaning processing apparatus
- Patent number 7,451,515
- Issue date Nov 18, 2008
- Tokyo Electron Limited
- Hidetomo Uemukai
- B08 - CLEANING
Information Patent Grant
Substrate dual-side processing apparatus
- Patent number 6,874,515
- Issue date Apr 5, 2005
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Cleaning processing system and cleaning processing apparatus
- Patent number 6,842,932
- Issue date Jan 18, 2005
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Substrate surface processing apparatus and method
- Patent number 6,652,662
- Issue date Nov 25, 2003
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Scrub washing method
- Patent number 6,491,760
- Issue date Dec 10, 2002
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Scrub washing apparatus and scrub washing method
- Patent number 6,292,972
- Issue date Sep 25, 2001
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Processing apparatus
- Patent number 6,178,580
- Issue date Jan 30, 2001
- Tokyo Electron Limited
- Akira Ishihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Cleaning processing system and cleaning processing apparatus
- Publication number 20050022325
- Publication date Feb 3, 2005
- Hidetomo Uemukai
- B08 - CLEANING
Information Patent Application
Substrate dual-side processing apparatus
- Publication number 20020157692
- Publication date Oct 31, 2002
- Akira Ishihara
- G02 - OPTICS
Information Patent Application
Cleaning processing system and cleaning processing apparatus
- Publication number 20020059686
- Publication date May 23, 2002
- Hidetomo Uemukai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scrub washing apparatus and scrub washing method
- Publication number 20010035200
- Publication date Nov 1, 2001
- Akira Ishihara
- G05 - CONTROLLING REGULATING