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Akira Ishii
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Amagasaki, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus for radiating microwave from rectangula...
Patent number
5,843,236
Issue date
Dec 1, 1998
Daihen Corporation
Hiroyuki Yoshiki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing apparatus for generating uniform strip-shaped pla...
Patent number
5,315,212
Issue date
May 24, 1994
Daihen Corporation
Akira Ishii
H01 - BASIC ELECTRIC ELEMENTS