TREA

Akira ISHIKAWA

Follow

Person

  • Miyagi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,967,511
    • Issue date Apr 23, 2024
    • Tokyo Electron Limited
    • Akira Ishikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,133,203
    • Issue date Sep 28, 2021
    • Tokyo Electron Limited
    • Satoshi Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,910,252
    • Issue date Feb 2, 2021
    • Tokyo Electron Limited
    • Yasuharu Sasaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing apparatus for target object and inspection method for pr...
    • Patent number 10,796,889
    • Issue date Oct 6, 2020
    • Tokyo Electron Limited
    • Akira Ishikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,388,558
    • Issue date Aug 20, 2019
    • Tokyo Electron Limited
    • Yasuharu Sasaki
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT
    • Publication number 20220415627
    • Publication date Dec 29, 2022
    • TOKYO ELECTRON LIMITED
    • Ryota NISHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220328329
    • Publication date Oct 13, 2022
    • TOKYO ELECTRON LIMITED
    • Akira Ishikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190326153
    • Publication date Oct 24, 2019
    • TOKYO ELECTRON LIMITED
    • Yasuharu SASAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190304814
    • Publication date Oct 3, 2019
    • TOKYO ELECTRON LIMITED
    • Akira Ishikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190304815
    • Publication date Oct 3, 2019
    • TOKYO ELECTRON LIMITED
    • Satoshi Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING APPARATUS FOR TARGET OBJECT AND INSPECTION METHOD FOR PR...
    • Publication number 20190027345
    • Publication date Jan 24, 2019
    • TOKYO ELECTRON LIMITED
    • Akira Ishikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20180158711
    • Publication date Jun 7, 2018
    • TOKYO ELECTRON LIMITED
    • Yasuharu SASAKI
    • H01 - BASIC ELECTRIC ELEMENTS