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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for performing a chemical oxide removal process
Patent number
8,175,736
Issue date
May 8, 2012
Tokyo Electron Limited
Masayuki Tomoyasu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and system for performing a chemical oxide removal process
Patent number
7,877,161
Issue date
Jan 25, 2011
Tokyo Electron Limited
Masayuki Tomoyasu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of maintaining and automatically inspecting processing appar...
Patent number
7,555,406
Issue date
Jun 30, 2009
Tokyo Electron Limited
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of self-diagnosing software for driving processing apparatus
Patent number
7,386,423
Issue date
Jun 10, 2008
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of automatically resetting processing apparatus
Patent number
6,954,716
Issue date
Oct 11, 2005
Tokyo Electron Limited
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR PERFORMING A CHEMICAL OXIDE REMOVAL PROCESS
Publication number
20110307089
Publication date
Dec 15, 2011
TOKYO ELECTRON LIMITED
Masayuki TOMOYASU
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of maintaining and automatically inspecting processing appar...
Publication number
20050090927
Publication date
Apr 28, 2005
TOKYO ELECTRON LIMITED
Hisato Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods of self-diagnosing software for driving processing apparatus
Publication number
20050090926
Publication date
Apr 28, 2005
TOKYO ELECTRON LIMITED
Hisato Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Method of operating a system for chemical oxide removal
Publication number
20040185583
Publication date
Sep 23, 2004
TOKYO ELECTRON LIMITED
Masayuki Tomoyasu
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for maintaining processor, method of automatically inspectin...
Publication number
20030182084
Publication date
Sep 25, 2003
Hisato Tanaka
G05 - CONTROLLING REGULATING