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Akira KAGEYAMA
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for manufacturing semiconductor device
Patent number
11,977,099
Issue date
May 7, 2024
HITACHI HIGH-TECH CORPORATION
Tomohisa Ohtaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evaluation apparatus for semiconductor device
Patent number
11,709,199
Issue date
Jul 25, 2023
HITACHI HIGH-TECH CORPORATION
Tomohisa Ohtaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Probe module and probe
Patent number
11,391,756
Issue date
Jul 19, 2022
HITACHI HIGH-TECH CORPORATION
Ryo Hirano
G01 - MEASURING TESTING
Information
Patent Grant
Circuit inspection method and sample inspection apparatus
Patent number
10,712,384
Issue date
Jul 14, 2020
HITACHI HIGH-TECH CORPORATION
Akira Kageyama
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Sample Inspection Apparatus
Publication number
20240255556
Publication date
Aug 1, 2024
Hitachi High-Tech Corporation
Tomoko SHIMAMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Semiconductor Device
Publication number
20210048450
Publication date
Feb 18, 2021
Hitachi High-Tech Corporation
Tomohisa OHTAKI
G01 - MEASURING TESTING
Information
Patent Application
Probe Module and Probe
Publication number
20210033642
Publication date
Feb 4, 2021
Hitachi High-Tech Corporation
Ryo HIRANO
G01 - MEASURING TESTING
Information
Patent Application
Evaluation Apparatus for Semiconductor Device
Publication number
20210025936
Publication date
Jan 28, 2021
Hitachi High-Tech Corporation
Tomohisa OHTAKI
G01 - MEASURING TESTING
Information
Patent Application
CIRCUIT INSPECTION METHOD AND SAMPLE INSPECTION APPARATUS
Publication number
20180246166
Publication date
Aug 30, 2018
Hitachi High-Technologies Corporation
Akira KAGEYAMA
H01 - BASIC ELECTRIC ELEMENTS