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Akira Kodashima
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing system
Patent number
11,515,183
Issue date
Nov 29, 2022
Tokyo Electron Limited
Suguru Motegi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system
Patent number
11,495,480
Issue date
Nov 8, 2022
Tokyo Electron Limited
Suguru Motegi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic field generator for magnetron plasma, and plasma etching a...
Patent number
7,922,865
Issue date
Apr 12, 2011
Shin-Etsu Chemical Co., Ltd.
Koji Miyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and lid supporting apparatus for the...
Patent number
7,883,579
Issue date
Feb 8, 2011
Tokyo Electron Limited
Akira Kodashima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20230015560
Publication date
Jan 19, 2023
TOKYO ELECTRON LIMITED
Suguru MOTEGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20210057243
Publication date
Feb 25, 2021
TOKYO ELECTRON LIMITED
Suguru MOTEGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20210043480
Publication date
Feb 11, 2021
TOKYO ELECTRON LIMITED
Suguru MOTEGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and lid supporting apparatus for the...
Publication number
20070131167
Publication date
Jun 14, 2007
TOKYO ELECTRON LIMITED
Akira Kodashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Magnetic field generator for magnetron plasma, and plasma etching a...
Publication number
20040094509
Publication date
May 20, 2004
Koji Miyata
H01 - BASIC ELECTRIC ELEMENTS