Akira KOSHIISHI

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Hollow cathode, an apparatus including a hollow cathode for manufac...
- Patent number 11,798,788
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam generator, plasma processing apparatus having the sam...
- Patent number 11,195,696
- Issue date Dec 7, 2021
- Samsung Electronics Co., Ltd.
- Dongkyu Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,950,414
- Issue date Mar 16, 2021
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...
- Publication number 20210110997
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Dongkyu SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...
- Publication number 20210057193
- Publication date Feb 25, 2021
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Method of Manufacturing Semiconduct...
- Publication number 20190122866
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...
- Publication number 20190122867
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS