Akira Kuibira

Person

Itami-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heating device for manufacturing semiconductor
- Patent number 7,999,210
- Issue date Aug 16, 2011
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus with a heat resistant hermetical...
- Patent number 7,837,798
- Issue date Nov 23, 2010
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor or liquid crystal producing device
- Patent number 7,806,984
- Issue date Oct 5, 2010
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic susceptor for semiconductor manufacturing equipment
- Patent number 7,491,432
- Issue date Feb 17, 2009
- Sumitomo Electric Industries, Ltd.
- Yoshifumi Kachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holder for use in semiconductor or liquid-crystal manufacturing dev...
- Patent number 7,414,823
- Issue date Aug 19, 2008
- Sumitomo Electric Industries, Ltd.
- Manabu Hashikura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holder and semiconductor manufacturing apparatus
- Patent number 7,408,131
- Issue date Aug 5, 2008
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic susceptor
- Patent number 7,394,043
- Issue date Jul 1, 2008
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus
- Patent number 7,361,230
- Issue date Apr 22, 2008
- Sumitomo Electric Industries, Ltd
- Masuhiro Natsuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor heating apparatus
- Patent number 7,268,322
- Issue date Sep 11, 2007
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder and semiconductor manufacturing apparatus
- Patent number 7,268,321
- Issue date Sep 11, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece holder for processing apparatus, and processing apparatus...
- Patent number 7,264,699
- Issue date Sep 4, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic joined body, substrate holding structure and substrate proc...
- Patent number 7,211,153
- Issue date May 1, 2007
- Sumitomo Electric Industries, Ltd
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater module for semiconductor manufacturing equipment
- Patent number 7,145,106
- Issue date Dec 5, 2006
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connecting structures
- Patent number 7,090,423
- Issue date Aug 15, 2006
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Temperature gauge and ceramic susceptor in which it is utilized
- Patent number 7,090,394
- Issue date Aug 15, 2006
- Sumitomo Electric Industries, Ltd.
- Manabu Hashikura
- G01 - MEASURING TESTING
Information Patent Grant
Workpiece holder for processing apparatus, and processing apparatus...
- Patent number 7,045,045
- Issue date May 16, 2006
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater module for semiconductor manufacturing equipment
- Patent number 6,963,052
- Issue date Nov 8, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic susceptor
- Patent number 6,946,625
- Issue date Sep 20, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ceramic susceptor
- Patent number 6,806,443
- Issue date Oct 19, 2004
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer holder for semiconductor manufacturing apparatus, and method...
- Patent number 6,716,304
- Issue date Apr 6, 2004
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuit pattern of resistance heating elements and substrate-treati...
- Patent number 6,664,515
- Issue date Dec 16, 2003
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heater member for mounting heating object and substrate processing...
- Patent number 6,653,604
- Issue date Nov 25, 2003
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder for semiconductor manufacturing apparatus and semicond...
- Patent number 6,554,906
- Issue date Apr 29, 2003
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder for semiconductor manufacturing apparatus, method of m...
- Patent number 6,508,884
- Issue date Jan 21, 2003
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas shower unit for semiconductor manufacturing apparatus and semic...
- Patent number 6,460,482
- Issue date Oct 8, 2002
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum nitride sintered body and manufacturing method thereof
- Patent number 6,403,510
- Issue date Jun 11, 2002
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Wafer holder for semiconductor manufacturing apparatus
- Patent number 6,365,879
- Issue date Apr 2, 2002
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon nitride ceramic sliding material and process for producing...
- Patent number 5,922,629
- Issue date Jul 13, 1999
- Sumitomo Electric Industries, Ltd.
- Jin-Joo Park
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
High strength silicon nitride sintered body and process for produci...
- Patent number 5,328,876
- Issue date Jul 12, 1994
- Sumitomo Electric Industries, Ltd.
- Takao Nishioka
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
High strength silicon nitride sintered body and process for produci...
- Patent number 5,234,642
- Issue date Aug 10, 1993
- Sumitomo Electric Industries, Ltd.
- Takao Nishioka
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Patents Applicationslast 30 patents

Information Patent Application
HOLDER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20100242844
- Publication date Sep 30, 2010
- Sumitono Electric Industries, Ltd.
- Akira KUIBIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TRANSFER MEMBER, CONVEX STRUCTURAL MEMBER, ELECTRONIC APPARATU...
- Publication number 20090126903
- Publication date May 21, 2009
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Holder for Use in Semiconductor or Liquid-Crystal Manufacturing Dev...
- Publication number 20070095291
- Publication date May 3, 2007
- Sumitomo Electric Industries, Ltd.
- Manabu Hashikura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heater Module for Semiconductor Manufacturing Equipment
- Publication number 20070068921
- Publication date Mar 29, 2007
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Holder and Semiconductor Manufacturing Apparatus
- Publication number 20070044718
- Publication date Mar 1, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heater for semiconductor manufacturing device and heating device eq...
- Publication number 20060289448
- Publication date Dec 28, 2006
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Workpiece Holder for Semiconductor Manufacturing Apparatus
- Publication number 20060201422
- Publication date Sep 14, 2006
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heater for semiconductor manufacturing device
- Publication number 20060201918
- Publication date Sep 14, 2006
- Sumitomo Electric Industries, Ltd.
- Tomoyuki Awazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20060177697
- Publication date Aug 10, 2006
- Sumitomo Electric Industries, Ltd.
- Yoshifumi Kachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor fabrication device heater and heating device equipped...
- Publication number 20060102613
- Publication date May 18, 2006
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Workpiece holder for processing apparatus, and processing apparatus...
- Publication number 20060037857
- Publication date Feb 23, 2006
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor heating apparatus
- Publication number 20050274325
- Publication date Dec 15, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating device
- Publication number 20050263516
- Publication date Dec 1, 2005
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Supporting unit for semiconductor manufacturing device and semicond...
- Publication number 20050253285
- Publication date Nov 17, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ceramics heater for semiconductor production system
- Publication number 20050241584
- Publication date Nov 3, 2005
- Sumitomo Electric Industries, Ltd.
- Yoshifumi Kachi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heater Module for Semiconductor Manufacturing Equipment
- Publication number 20050242079
- Publication date Nov 3, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Susceptor
- Publication number 20050242078
- Publication date Nov 3, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Ceramics heater for semiconductor production system
- Publication number 20050184054
- Publication date Aug 25, 2005
- Yoshifumi Kachi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Ceramics heater for semiconductor production system
- Publication number 20050167422
- Publication date Aug 4, 2005
- Yoshifumi Kachi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wafer holder and semiconductor manufacturing apparatus
- Publication number 20050166848
- Publication date Aug 4, 2005
- Masuhiro Natsuhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
WORKPIECE HOLDER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20050160989
- Publication date Jul 28, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer holder and system for producing semiconductor
- Publication number 20050077284
- Publication date Apr 14, 2005
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Susceptor
- Publication number 20050000956
- Publication date Jan 6, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Holder for Use in Semiconductor or Liquid-Crystal Manufacturing Dev...
- Publication number 20040244695
- Publication date Dec 9, 2004
- Sumitomo Electric Industries, Ltd.
- Manabu Hashikura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heating device for manufacturing semiconductor
- Publication number 20040238520
- Publication date Dec 2, 2004
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heater module for semiconductor production system
- Publication number 20040238523
- Publication date Dec 2, 2004
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE GAUGE AND CERAMIC SUSCEPTOR IN WHICH IT IS UTILIZED
- Publication number 20040208228
- Publication date Oct 21, 2004
- Sumitomo Electric Industries, Ltd.
- Manabu Hashikura
- G01 - MEASURING TESTING
Information Patent Application
Holder for semiconductor production system
- Publication number 20040182321
- Publication date Sep 23, 2004
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Holder for use in semiconductor or liquid-crystal manufacturing dev...
- Publication number 20040169033
- Publication date Sep 2, 2004
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for manufacturing semiconductor or liquid crystal
- Publication number 20040168641
- Publication date Sep 2, 2004
- Akira Kuibira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akira Kuibira

Person

Patents Grantslast 30 patents

Heating device for manufacturing semiconductor

Semiconductor processing apparatus with a heat resistant hermetical...

Semiconductor or liquid crystal producing device

Ceramic susceptor for semiconductor manufacturing equipment

Holder for use in semiconductor or liquid-crystal manufacturing dev...

Wafer holder and semiconductor manufacturing apparatus

Ceramic susceptor

Substrate processing apparatus

Semiconductor heating apparatus

Wafer holder and semiconductor manufacturing apparatus

Workpiece holder for processing apparatus, and processing apparatus...

Ceramic joined body, substrate holding structure and substrate proc...

Heater module for semiconductor manufacturing equipment

Connecting structures

Temperature gauge and ceramic susceptor in which it is utilized

Workpiece holder for processing apparatus, and processing apparatus...

Heater module for semiconductor manufacturing equipment

Ceramic susceptor

Ceramic susceptor

Wafer holder for semiconductor manufacturing apparatus, and method...

Circuit pattern of resistance heating elements and substrate-treati...

Heater member for mounting heating object and substrate processing...

Wafer holder for semiconductor manufacturing apparatus and semicond...

Wafer holder for semiconductor manufacturing apparatus, method of m...

Gas shower unit for semiconductor manufacturing apparatus and semic...

Aluminum nitride sintered body and manufacturing method thereof

Wafer holder for semiconductor manufacturing apparatus

Silicon nitride ceramic sliding material and process for producing...

High strength silicon nitride sintered body and process for produci...

High strength silicon nitride sintered body and process for produci...

Patents Applicationslast 30 patents

HOLDER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

HEAT TRANSFER MEMBER, CONVEX STRUCTURAL MEMBER, ELECTRONIC APPARATU...

Holder for Use in Semiconductor or Liquid-Crystal Manufacturing Dev...

Heater Module for Semiconductor Manufacturing Equipment

Wafer Holder and Semiconductor Manufacturing Apparatus

Heater for semiconductor manufacturing device and heating device eq...

Workpiece Holder for Semiconductor Manufacturing Apparatus

Heater for semiconductor manufacturing device

CERAMIC SUSCEPTOR FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

Semiconductor fabrication device heater and heating device equipped...

Workpiece holder for processing apparatus, and processing apparatus...

Semiconductor heating apparatus

Heating device

Supporting unit for semiconductor manufacturing device and semicond...

Ceramics heater for semiconductor production system

Heater Module for Semiconductor Manufacturing Equipment

Ceramic Susceptor

Ceramics heater for semiconductor production system

Ceramics heater for semiconductor production system

Wafer holder and semiconductor manufacturing apparatus

WORKPIECE HOLDER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

Wafer holder and system for producing semiconductor

Ceramic Susceptor

Holder for Use in Semiconductor or Liquid-Crystal Manufacturing Dev...

Heating device for manufacturing semiconductor

Heater module for semiconductor production system

TEMPERATURE GAUGE AND CERAMIC SUSCEPTOR IN WHICH IT IS UTILIZED

Holder for semiconductor production system

Holder for use in semiconductor or liquid-crystal manufacturing dev...

Apparatus for manufacturing semiconductor or liquid crystal