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Akira MATSUBARA

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  • Iwate, JP
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Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD
    • Publication number 20250003070
    • Publication date Jan 2, 2025
    • TOKYO ELECTRON LIMITED
    • Akira MATSUBARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION METHOD AND DEPOSITION APPARATUS
    • Publication number 20230407466
    • Publication date Dec 21, 2023
    • TOKYO ELECTRON LIMITED
    • Muneyuki OTANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...