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Akira Mikumo

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  • Osaka, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Heater
    • Patent number 12,063,721
    • Issue date Aug 13, 2024
    • Sumitomo Electric Industries, Ltd.
    • Shigenobu Sakita
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Semiconductor manufacturing apparatus and wafer holding table for s...
    • Patent number 12,046,488
    • Issue date Jul 23, 2024
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer holding body
    • Patent number 12,033,880
    • Issue date Jul 9, 2024
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer holder
    • Patent number 11,732,359
    • Issue date Aug 22, 2023
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead and method for manufacturing the same
    • Patent number 11,239,057
    • Issue date Feb 1, 2022
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead
    • Patent number 11,195,701
    • Issue date Dec 7, 2021
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer holder
    • Patent number 11,127,605
    • Issue date Sep 21, 2021
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer holding unit
    • Patent number 10,886,157
    • Issue date Jan 5, 2021
    • Sumitomo Electric Industries, Ltd.
    • Koichi Kimura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Heater unit and semiconductor manufacturing apparatus including the...
    • Patent number 7,554,059
    • Issue date Jun 30, 2009
    • Sumitomo Electric Industries, Ltd.
    • Tomoyuki Awazu
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Superconducting wire
    • Patent number 6,777,376
    • Issue date Aug 17, 2004
    • Sumitomo Electric Industries, Ltd.
    • Tetsuyuki Kaneko
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Manufacturing method of superconducting wire
    • Patent number 6,493,925
    • Issue date Dec 17, 2002
    • Sumitomo Electric Industries, Ltd.
    • Tetsuyuki Kaneko
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Nb.sub.3 Al multi-filamentary superconducting wire
    • Patent number 5,891,585
    • Issue date Apr 6, 1999
    • Sumitomo Elkectric Industries, Ltd.
    • Naoki Ayai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatus for adjusting sectional area ratio of metal-covered elect...
    • Patent number 5,779,864
    • Issue date Jul 14, 1998
    • Sumitomo Electric Industries, Ltd.
    • Akira Mikumo
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Grant

    Method and apparatus for adjusting sectional area ratio of metal-co...
    • Patent number 5,602,488
    • Issue date Feb 11, 1997
    • Sumitomo Electric Industries, Ltd.
    • Akira Mikumo
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Grant

    Method and apparatus for adjusting sectional area ratio of metal-co...
    • Patent number 5,507,924
    • Issue date Apr 16, 1996
    • Sumitomo Electric Industries, Ltd.
    • Akira Mikumo
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER HOLDER
    • Publication number 20230340668
    • Publication date Oct 26, 2023
    • Sumitomo Electric Industries, Ltd.
    • Koichi KIMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEATER
    • Publication number 20220151027
    • Publication date May 12, 2022
    • Sumitomo Electric Industries, Ltd.
    • Shigenobu SAKITA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING APPARATUS AND WAFER HOLDING TABLE FOR S...
    • Publication number 20210375647
    • Publication date Dec 2, 2021
    • Sumitomo Electric Industries, Ltd.
    • Koichi KIMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER HOLDING BODY
    • Publication number 20210074568
    • Publication date Mar 11, 2021
    • Sumitomo Electric Industries, Ltd.
    • Koichi KIMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD
    • Publication number 20210027988
    • Publication date Jan 28, 2021
    • Sumitomo Electric Industries, Ltd.
    • Koichi KIMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER HOLDER
    • Publication number 20200340102
    • Publication date Oct 29, 2020
    • Sumitomo Electric Industries, Ltd.
    • Koichi KIMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND METHOD FOR MANUFACTURING THE SAME
    • Publication number 20200168435
    • Publication date May 28, 2020
    • Sumitomo Electric Industries, Ltd.
    • Koichi KIMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER HOLDER
    • Publication number 20190051543
    • Publication date Feb 14, 2019
    • Sumitomo Electric Industries, Ltd.
    • Koichi KIMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER HOLDING UNIT
    • Publication number 20180174878
    • Publication date Jun 21, 2018
    • Sumitomo Electric Industries, Ltd.
    • Koichi KIMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEATER UNIT, HEATING AND COOLING DEVICE, AND APPARATUS COMPRISING SAME
    • Publication number 20110139399
    • Publication date Jun 16, 2011
    • Sumitomo Electric Industries, Ltd.
    • Katsuhiro ITAKURA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    HEATING UNIT AND THE APPARATUS HAVING THE SAME
    • Publication number 20100044364
    • Publication date Feb 25, 2010
    • Sumitomo Electric Industries, Ltd.
    • Akira MIKUMO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    HEATING AND COOLING MODULE
    • Publication number 20070215602
    • Publication date Sep 20, 2007
    • Sumitomo Electric Industries, Ltd.
    • Masuhiro Natsuhara
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Composite and susceptor for semiconductor manufacturing device and...
    • Publication number 20070069174
    • Publication date Mar 29, 2007
    • Sumitomo Electric Industries, Ltd.
    • Masuhiro Natsuhara
    • B22 - CASTING POWDER METALLURGY
  • Information Patent Application

    Heating unit and the apparatus having the same
    • Publication number 20070062929
    • Publication date Mar 22, 2007
    • Akira Mikumo
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Heater unit and semiconductor manufacturing apparatus including the...
    • Publication number 20070056953
    • Publication date Mar 15, 2007
    • SUMITOMO ELECTRIC INDUSTRIES, LTD.
    • Tomoyuki Awazu
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Semiconductor heating heater holder and semiconductor manufacturing...
    • Publication number 20070054424
    • Publication date Mar 8, 2007
    • Masuhiro Natsuhara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Body for keeping a wafer, method of manufacturing the same and devi...
    • Publication number 20070029740
    • Publication date Feb 8, 2007
    • Masuhiro Natsuhara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Semiconductor fabrication device heater and heating device equipped...
    • Publication number 20060102613
    • Publication date May 18, 2006
    • Sumitomo Electric Industries, Ltd.
    • Akira Kuibira
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR