Akira Morita

Person

  • Kyoto, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer treating apparatus

    • Patent number 7,758,717
    • Issue date Jul 20, 2010
    • Dainippon Screen Mfg. Co., Ltd.
    • Koji Hasegawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate treating apparatus

    • Patent number 7,422,681
    • Issue date Sep 9, 2008
    • Dainippon Screen Mfg. Co., Ltd.
    • Toshio Hiroe
    • C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
  • Information Patent Grant

    Substrate treating apparatus

    • Patent number 7,160,416
    • Issue date Jan 9, 2007
    • Dainippon Screen Mfg. Co., Ltd.
    • Koji Hasegawa
    • B08 - CLEANING

Patents Applicationslast 30 patents

  • Information Patent Application

    Wafer treating apparatus

    • Publication number 20060191635
    • Publication date Aug 31, 2006
    • Dainippon Screen Mfg. Co., Ltd.
    • Koji Hasegawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate treating apparatus

    • Publication number 20050258085
    • Publication date Nov 24, 2005
    • Dainippon Screen Mfg. Co., Ltd.
    • Toshio Hiroe
    • C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
  • Information Patent Application

    Substrate treating apparatus

    • Publication number 20050217793
    • Publication date Oct 6, 2005
    • Dainippon Screen Mfg. Co., Ltd.
    • Koji Hasegawa
    • B08 - CLEANING
  • Information Patent Application

    Substrate treating method and apparatus

    • Publication number 20040242004
    • Publication date Dec 2, 2004
    • Dainippon Screen Mfg. Co., Ltd.
    • Hajime Shirakawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...