Akira Morohashi

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Guide apparatus, exposure apparatus, and method of manufacturing ar...
- Patent number 9,373,532
- Issue date Jun 21, 2016
- Canon Kabushiki Kaisha
- Akira Morohashi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Stage apparatus with flexible utility line, lithography apparatus,...
- Patent number 9,280,068
- Issue date Mar 8, 2016
- Canon Kabushiki Kaisha
- Akira Morohashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Driving apparatus, exposure apparatus, and method of manufacturing...
- Patent number 9,124,151
- Issue date Sep 1, 2015
- Canon Kabushiki Kaisha
- Akira Morohashi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Heat treatment apparatus and method of manufacturing substrates
- Patent number 8,963,051
- Issue date Feb 24, 2015
- Hitachi Kokusai Electric Inc.
- Tomoharu Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat-treating apparatus and method of producing substrates
- Patent number 7,901,206
- Issue date Mar 8, 2011
- Hitachi Kokusai Electric Inc.
- Akira Morohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and method of manufacturing substrate
- Patent number 7,891,975
- Issue date Feb 22, 2011
- Hitachi Kokusai Electric, Inc.
- Ryota Sasajima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Fabrication of B-doped silicon film by LPCVD method using BCI3 and...
- Patent number 6,905,963
- Issue date Jun 14, 2005
- Hitachi Kokusai Electric, Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20140118710
- Publication date May 1, 2014
- Canon Kabushiki Kaisha
- Akira Morohashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURI...
- Publication number 20140118709
- Publication date May 1, 2014
- Canon Kabushiki Kaisha
- Akira Morohashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GUIDE APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING AR...
- Publication number 20130273477
- Publication date Oct 17, 2013
- Canon Kabushiki Kaisha
- Akira MOROHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRIVING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20130271743
- Publication date Oct 17, 2013
- Canon Kabushiki Kaisha
- Akira MOROHASHI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Heat-treating apparatus and method of producing substrates
- Publication number 20090016854
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Morohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat Treatment Apparatus and Method of Manufacturing Substrates
- Publication number 20080190910
- Publication date Aug 14, 2008
- Hitachi Kokusai Electric Inc.
- Tomoharu Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat Treatment Apparatus and Method of Manufacturing Substrate
- Publication number 20070297876
- Publication date Dec 27, 2007
- Ryota Sasajima
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat Treatment Apparatus
- Publication number 20070275570
- Publication date Nov 29, 2007
- Hitachi Kokusai Electric Inc.
- Naoto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a semiconductor device and a substrate proce...
- Publication number 20030077920
- Publication date Apr 24, 2003
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20030024477
- Publication date Feb 6, 2003
- Hitachi Kokusai Electric Inc.
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akira Morohashi

Person

Patents Grantslast 30 patents

Guide apparatus, exposure apparatus, and method of manufacturing ar...

Stage apparatus with flexible utility line, lithography apparatus,...

Driving apparatus, exposure apparatus, and method of manufacturing...

Heat treatment apparatus and method of manufacturing substrates

Heat-treating apparatus and method of producing substrates

Heat treatment apparatus and method of manufacturing substrate

Fabrication of B-doped silicon film by LPCVD method using BCI3 and...

Patents Applicationslast 30 patents

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURI...

GUIDE APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING AR...

DRIVING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING...

Heat-treating apparatus and method of producing substrates

Heat Treatment Apparatus and Method of Manufacturing Substrates

Heat Treatment Apparatus and Method of Manufacturing Substrate

Heat Treatment Apparatus

Method for fabricating a semiconductor device and a substrate proce...

Substrate processing apparatus