Akira Mugino

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Newton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
MEMS devices and methods of manufacture
- Patent number 6,812,055
- Issue date Nov 2, 2004
- Advanced Microsensors
- Hirokazu Tamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of manufacture
- Patent number 6,717,227
- Issue date Apr 6, 2004
- Advanced Microsensors
- Hirokazu Tamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICES AND METHODS OF MANUFACTURE
- Publication number 20040129953
- Publication date Jul 8, 2004
- Hirokazu Tamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS devices and methods of manufacture
- Publication number 20030156451
- Publication date Aug 21, 2003
- Fitel Technologies, Inc.
- Hirokazu Tamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY