Akira Murata

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate storage apparatus, substrate storage method, and recordin...
- Patent number 11,699,608
- Issue date Jul 11, 2023
- Tokyo Electron Limited
- Akihiro Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,689,762
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Akira Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,666,463
- Issue date May 30, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, substrate processing apparatus, and subs...
- Patent number 9,373,531
- Issue date Jun 21, 2016
- Tokyo Electron Limited
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,845,262
- Issue date Sep 30, 2014
- Tokyo Electron Limited
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas treatment apparatus, gas treatment method, and storage medium
- Patent number 8,317,924
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Akira Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer apparatus, substrate process system, and substra...
- Patent number 8,277,163
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE STORAGE APPARATUS, SUBSTRATE STORAGE METHOD, AND RECORDIN...
- Publication number 20200058531
- Publication date Feb 20, 2020
- TOKYO ELECTRON LIMITED
- Akihiro MATSUMOTO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180010252
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Akira Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150187621
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBS...
- Publication number 20140234058
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESS SYSTEM, AND SUBSTRA...
- Publication number 20120148378
- Publication date Jun 14, 2012
- TOKYO ELECTRON LIMITED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20110311340
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMTED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS TREATMENT APPARATUS, GAS TREATMENT METHOD, AND STORAGE MEDIUM
- Publication number 20100050867
- Publication date Mar 4, 2010
- TOKYO ELECTRON LIMITED
- Akira MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate transfer apparatus, substrate process system, and substra...
- Publication number 20070274811
- Publication date Nov 29, 2007
- TOKYO ELECTRON LIMITED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS

Akira Murata

Person

Patents Grantslast 30 patents

Substrate storage apparatus, substrate storage method, and recordin...

Substrate processing apparatus, substrate processing method and rec...

Substrate processing apparatus

Substrate transfer device, substrate processing apparatus, and subs...

Substrate processing apparatus, substrate processing method and sto...

Gas treatment apparatus, gas treatment method, and storage medium

Substrate transfer apparatus, substrate process system, and substra...

Patents Applicationslast 30 patents

SUBSTRATE STORAGE APPARATUS, SUBSTRATE STORAGE METHOD, AND RECORDIN...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBS...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESS SYSTEM, AND SUBSTRA...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

GAS TREATMENT APPARATUS, GAS TREATMENT METHOD, AND STORAGE MEDIUM

Substrate transfer apparatus, substrate process system, and substra...