Akira Obi

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method
- Patent number 8,821,742
- Issue date Sep 2, 2014
- Tokyo Electron Limited
- Ryoichi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,475,623
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,257,601
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of maintaining and automatically inspecting processing appar...
- Patent number 7,555,406
- Issue date Jun 30, 2009
- Tokyo Electron Limited
- Hisato Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of self-diagnosing software for driving processing apparatus
- Patent number 7,386,423
- Issue date Jun 10, 2008
- Hisato Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool and transfer control method
- Patent number 7,245,987
- Issue date Jul 17, 2007
- Tokyo Electron Limited
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting substrate processing apparatus, and storage me...
- Patent number 7,191,082
- Issue date Mar 13, 2007
- Tokyo Electron Limited
- Akira Obi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Cluster tool and method for controlling transport
- Patent number 6,970,770
- Issue date Nov 29, 2005
- Tokyo Electron Limited
- Kiyohito Iljima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of automatically resetting processing apparatus
- Patent number 6,954,716
- Issue date Oct 11, 2005
- Tokyo Electron Limited
- Hisato Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20120292290
- Publication date Nov 22, 2012
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20110171830
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS
- Publication number 20100133234
- Publication date Jun 3, 2010
- TOKYO ELECTRON LIMITED
- Ryoichi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of inspecting substrate processing apparatus, and storage me...
- Publication number 20060160256
- Publication date Jul 20, 2006
- TOKYO ELECTRON LIMITED
- Akira Obi
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing method, system and program
- Publication number 20060090703
- Publication date May 4, 2006
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching apparatus
- Publication number 20060042754
- Publication date Mar 2, 2006
- TOKYO ELECTRON LIMITED
- Ryoichi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cluster tool and transfer control method
- Publication number 20050220577
- Publication date Oct 6, 2005
- TOKYO ELECTRON LIMITED
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of maintaining and automatically inspecting processing appar...
- Publication number 20050090927
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Hisato Tanaka
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods of self-diagnosing software for driving processing apparatus
- Publication number 20050090926
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Hisato Tanaka
- G05 - CONTROLLING REGULATING
Information Patent Application
Semiconductor processing system
- Publication number 20050064609
- Publication date Mar 24, 2005
- TOKYO ELECTRON LIMITED
- Hideki Nagaoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cluster tool and method for controlling transport
- Publication number 20040117059
- Publication date Jun 17, 2004
- Kiyohito IIjima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Part maintenance system and part maintenance method of semiconducto...
- Publication number 20040071161
- Publication date Apr 15, 2004
- TOKYO ELECTRON LIMITED
- Kazushi Tahara
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for maintaining processor, method of automatically inspectin...
- Publication number 20030182084
- Publication date Sep 25, 2003
- Hisato Tanaka
- G05 - CONTROLLING REGULATING
Information Patent Application
Part maintenance device of semiconductor processing system and meth...
- Publication number 20020000677
- Publication date Jan 3, 2002
- TOKYO ELECTRON LIMITED
- Kazushi Tahara
- G05 - CONTROLLING REGULATING

Person

Patents Grantslast 30 patents

Plasma etching method

Substrate processing method, system and program

Substrate processing method, system and program

Method of maintaining and automatically inspecting processing appar...

Methods of self-diagnosing software for driving processing apparatus

Cluster tool and transfer control method

Method of inspecting substrate processing apparatus, and storage me...

Cluster tool and method for controlling transport

Method of automatically resetting processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

PLASMA ETCHING APPARATUS

Method of inspecting substrate processing apparatus, and storage me...

Substrate processing method, system and program

Plasma etching apparatus

Cluster tool and transfer control method

Method of maintaining and automatically inspecting processing appar...

Methods of self-diagnosing software for driving processing apparatus

Semiconductor processing system

Cluster tool and method for controlling transport

Part maintenance system and part maintenance method of semiconducto...

Method for maintaining processor, method of automatically inspectin...

Part maintenance device of semiconductor processing system and meth...