Akira Ogata

Follow

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus including turntable with polishing surface of d...
- Patent number RE39262
- Issue date Sep 5, 2006
- Ebara Corporation
- Masayoshi Hirose
- 451 - Abrading
Information Patent Grant
Polishing apparatus including turntable with polishing surface of d...
- Patent number 6,102,786
- Issue date Aug 15, 2000
- Ebara Corporation
- Masayoshi Hirose
- B24 - GRINDING POLISHING
Information Patent Grant
System for detecting the endpoint of the polishing of a semiconduct...
- Patent number 6,042,454
- Issue date Mar 28, 2000
- Ebara Corporation
- Katsuhide Watanabe
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus including turntable with polishing surface of d...
- Patent number 5,888,126
- Issue date Mar 30, 1999
- Ebara Corporation
- Masayoshi Hirose
- B24 - GRINDING POLISHING