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Akira Onodera
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Fuchu, JP
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last 30 patents
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Patent Grant
Heat treatment method that includes a low negative pressure
Patent number
6,852,601
Issue date
Feb 8, 2005
Tokyo Electron Limited
Seiichi Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Heat treatment method and heat treatment apparatus
Patent number
6,409,503
Issue date
Jun 25, 2002
Tokyo Electron Limited
Seiichi Yoshida
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
Heat treatment method and heat treatment apparatus
Publication number
20020110769
Publication date
Aug 15, 2002
Seiichi Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...