Akira Oozono

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 7,736,498
- Issue date Jun 15, 2010
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 7,547,614
- Issue date Jun 16, 2009
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20090214759
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Solution treatment apparatus and solution treatment method
- Publication number 20060189103
- Publication date Aug 24, 2006
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS