Akira Owatari

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electroless plating apparatus and electroless plating method
- Patent number 7,878,144
- Issue date Feb 1, 2011
- Ebara Corporation
- Akira Owatari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,575,636
- Issue date Aug 18, 2009
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming metal film
- Patent number 7,498,261
- Issue date Mar 3, 2009
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,442,257
- Issue date Oct 28, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing substrate
- Patent number 7,285,492
- Issue date Oct 23, 2007
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,087,117
- Issue date Aug 8, 2006
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 6,824,613
- Issue date Nov 30, 2004
- Ebara Corporation
- Naoki Dai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLATING METHOD, INSOLUBLE ANODE FOR PLATING, AND PLATING APPARATUS
- Publication number 20220228285
- Publication date Jul 21, 2022
- EBARA CORPORATION
- Hiroyuki Kanda
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20100105154
- Publication date Apr 29, 2010
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PRO...
- Publication number 20100075498
- Publication date Mar 25, 2010
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for forming magnetic film
- Publication number 20080176008
- Publication date Jul 24, 2008
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20080138508
- Publication date Jun 12, 2008
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same, and Pro...
- Publication number 20080067679
- Publication date Mar 20, 2008
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing substrate
- Publication number 20080000776
- Publication date Jan 3, 2008
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20070224811
- Publication date Sep 27, 2007
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless plating apparatus and electroless plating method
- Publication number 20070092658
- Publication date Apr 26, 2007
- Akira Owatari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060243205
- Publication date Nov 2, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060243204
- Publication date Nov 2, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060236929
- Publication date Oct 26, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for forming metal film
- Publication number 20060057839
- Publication date Mar 16, 2006
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing substrate
- Publication number 20050245080
- Publication date Nov 3, 2005
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wet processing method and processing apparatus of substrate
- Publication number 20050208774
- Publication date Sep 22, 2005
- Akira Fukunaga
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050072358
- Publication date Apr 7, 2005
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20050022909
- Publication date Feb 3, 2005
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20030221612
- Publication date Dec 4, 2003
- Naoki Dai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akira Owatari

Person

Patents Grantslast 30 patents

Electroless plating apparatus and electroless plating method

Substrate processing apparatus and substrate processing method

Method and apparatus for forming metal film

Substrate processing apparatus and substrate processing method

Method for processing substrate

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Patents Applicationslast 30 patents

PLATING METHOD, INSOLUBLE ANODE FOR PLATING, AND PLATING APPARATUS

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PRO...

Apparatus and method for forming magnetic film

Substrate Processing Method and Substrate Processing Apparatus

Semiconductor Device and Method for Manufacturing the Same, and Pro...

Method and apparatus for processing substrate

Substrate processing method and substrate processing apparatus

Electroless plating apparatus and electroless plating method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Method and apparatus for forming metal film

Method and apparatus for processing substrate

Wet processing method and processing apparatus of substrate

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus