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Pressure measuring sensor
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Patent number 5,257,546
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Issue date Nov 2, 1993
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Hitachi, Ltd.
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Tomoyuki Tobita
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G01 - MEASURING TESTING
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Multi-functional sensor
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Patent number 4,986,127
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Issue date Jan 22, 1991
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Hitachi, Ltd.
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Satoshi Shimada
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G01 - MEASURING TESTING
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Pattern test apparatus
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Patent number 4,962,541
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Issue date Oct 9, 1990
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Hitachi, Ltd.
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Hideaki Doi
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G06 - COMPUTING CALCULATING COUNTING
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Pattern inspection system
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Patent number 4,908,871
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Issue date Mar 13, 1990
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Hitachi, Ltd.
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Yasuhiko Hara
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G06 - COMPUTING CALCULATING COUNTING
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