Akira Satoh

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Gunma, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pyrolytic boron nitride container and manufacture thereof
- Patent number 6,197,391
- Issue date Mar 6, 2001
- Shin-Etsu Chemical Co., Ltd.
- Noboru Kimura
- C30 - CRYSTAL GROWTH
Information Patent Grant
Pyrolytic boron nitride container, and manufacture thereof
- Patent number 5,925,429
- Issue date Jul 20, 1999
- Shin-Etsu Chemical Co., Ltd.
- Noboru Kimura
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Wafer heating apparatus having electrostatic adsorption function
- Publication number 20040223285
- Publication date Nov 11, 2004
- SHIN-ETSU CHEMICAL CO., LTD.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Thermocouple protective tube
- Publication number 20030217767
- Publication date Nov 27, 2003
- Shin-Etsu Chemical Co., Ltd.
- Takuma Kushihashi
- G01 - MEASURING TESTING