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Akira Sekiya

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  • Tsukuba, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Process for production of carbonyl fluoride
    • Patent number 8,513,458
    • Issue date Aug 20, 2013
    • Nat'l Institute of Advanced Industrial Science and Technology
    • Heng-dao Quan
    • C01 - INORGANIC CHEMISTRY
  • Information Patent Grant

    CVD apparatus and method of cleaning the CVD apparatus
    • Patent number 8,277,560
    • Issue date Oct 2, 2012
    • National Institute of Advanced Industrial Science and Technology
    • Katsuo Sakai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Device for cleaning CVD device and method of cleaning CVD device
    • Patent number 8,043,438
    • Issue date Oct 25, 2011
    • National Institute of Advanced Industrial Science and Technology
    • Katsuo Sakai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process for producing carbonyl fluoride
    • Patent number 7,332,628
    • Issue date Feb 19, 2008
    • National Institute of Advanced Industrial Science and Technology
    • Yuki Mitsui
    • C01 - INORGANIC CHEMISTRY
  • Information Patent Grant

    Method for removing harmful substance in vent gas
    • Patent number 7,326,279
    • Issue date Feb 5, 2008
    • Kanto Denka Kogyo Co., Ltd.
    • Yasuo Nakazawa
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Plasma cleaning gas and plasma cleaning method
    • Patent number 7,322,368
    • Issue date Jan 29, 2008
    • Akira Sekiya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Porous aluminum fluoride
    • Patent number 7,247,289
    • Issue date Jul 24, 2007
    • National Institute of Advanced Industrial Science and Technology
    • Hengdao Quan
    • C07 - ORGANIC CHEMISTRY
  • Information Patent Grant

    Cleaning gas and etching gas
    • Patent number 7,138,364
    • Issue date Nov 21, 2006
    • Asahi Glass Company, Limited
    • Yutaka Ohira
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Cleaning gases and etching gases
    • Patent number 6,787,053
    • Issue date Sep 7, 2004
    • Asahi Glass Company, Limited
    • Akira Sekiya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Dry etching gas
    • Patent number 6,514,425
    • Issue date Feb 4, 2003
    • Agency of Industrial Science & Technology
    • Akira Sekiya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Fluorinated, saturated hydrocarbons
    • Patent number 6,403,846
    • Issue date Jun 11, 2002
    • Japan as represented by Director General of Agency of Industrial Science and...
    • Akira Sekiya
    • C07 - ORGANIC CHEMISTRY
  • Information Patent Grant

    Dry etching method
    • Patent number 6,383,403
    • Issue date May 7, 2002
    • Japan as represented by the Director General of the Agency of Industrial Scie...
    • Akira Sekiya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gas composition for dry etching and process of dry etching
    • Patent number 6,322,715
    • Issue date Nov 27, 2001
    • Japan as represented by Director General of the Agency of Industrial Science...
    • Akira Sekiya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Process for the preparation of fluorinated olefin
    • Patent number 6,211,420
    • Issue date Apr 3, 2001
    • Japan as represented by Director General of Agency of Industrial Science and...
    • Akira Sekiya
    • C07 - ORGANIC CHEMISTRY
  • Information Patent Grant

    Process for producing fluorinated alkene and fluorinated alkane
    • Patent number 5,847,243
    • Issue date Dec 8, 1998
    • Japan as represented by Director General of the Agency of Industrial Science...
    • Akira Sekiya
    • C07 - ORGANIC CHEMISTRY
  • Information Patent Grant

    Process for preparing trifluorohydrocarbon compound
    • Patent number 5,302,764
    • Issue date Apr 12, 1994
    • Japan as represented by Director General of Agency of Industrial Science and...
    • Akira Sekiya
    • C07 - ORGANIC CHEMISTRY
  • Information Patent Grant

    Fluorine-containing polymeric compound and a method for the prepara...
    • Patent number 5,071,915
    • Issue date Dec 10, 1991
    • Japan as represented by Director General of Agency of Industrial Science and...
    • Akira Sekiya
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
  • Information Patent Grant

    Fluorine-containing polymeric compound and a method for the prepara...
    • Patent number 5,001,198
    • Issue date Mar 19, 1991
    • Director General of Agency of Industrial Science and Technology
    • Akira Sekiya
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
  • Information Patent Grant

    Fluorine-containing polymeric compound and method for the preparati...
    • Patent number 4,997,886
    • Issue date Mar 5, 1991
    • Japan as represented by Director General of Agency of Industrial Science and...
    • Akira Sekiya
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
  • Information Patent Grant

    Fluorine-containing polymeric amine-amide compound and a method for...
    • Patent number 4,822,860
    • Issue date Apr 18, 1989
    • Director General of Agency of Industrial Science and Technology
    • Akira Sekiya
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents